JPS6415767A - Electric discharge device - Google Patents
Electric discharge deviceInfo
- Publication number
- JPS6415767A JPS6415767A JP17086587A JP17086587A JPS6415767A JP S6415767 A JPS6415767 A JP S6415767A JP 17086587 A JP17086587 A JP 17086587A JP 17086587 A JP17086587 A JP 17086587A JP S6415767 A JPS6415767 A JP S6415767A
- Authority
- JP
- Japan
- Prior art keywords
- film
- thickness
- dielectric material
- 50angstrom
- constitution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003989 dielectric material Substances 0.000 abstract 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 2
- 230000007797 corrosion Effects 0.000 abstract 2
- 238000005260 corrosion Methods 0.000 abstract 2
- 229910052593 corundum Inorganic materials 0.000 abstract 2
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 230000003449 preventive effect Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Electrostatic Charge, Transfer And Separation In Electrography (AREA)
Abstract
PURPOSE:To improve the durability of a device by changing the quality of a 2nd inorg. dielectric film thereby forming a prescribed 3-layered structure at the time of covering two electrodes on a 1st dielectric material with the 2nd dielectric material, forming the 3rd electrode thereon and covering the same with the 3rd dielectric material. CONSTITUTION:The Cr electrodes 4, 5 on an Al2O3 substrate 2 is coated with Al2O5 ceramics 3 and the electrode 6 consisting of Ti, W, etc., having high resistance to corrosion and oxidation is provided thereon. The Al2O3 layer 3 is formed into the 3-layered structure. The inside layer 31 is first formed to 0.3mum thickness at 50Angstrom /min, the intermediate 32 to 9mum thickness at about 750Angstrom /min and the outside layer 33 to 0.7mum thickness at about 50Angstrom /min, by which the film 31 having high adhesion, the film 32 allowing easy film formation and the dense film 33 having the high discharge resistance are obtd. A corrosion preventive function is improved and the destaticization and electrostatic charge uniform and stable over a long period of time are enabled according to this constitution. The performance of the device is improved as well.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17086587A JPH0795204B2 (en) | 1987-07-10 | 1987-07-10 | Discharge device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17086587A JPH0795204B2 (en) | 1987-07-10 | 1987-07-10 | Discharge device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6415767A true JPS6415767A (en) | 1989-01-19 |
| JPH0795204B2 JPH0795204B2 (en) | 1995-10-11 |
Family
ID=15912746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17086587A Expired - Fee Related JPH0795204B2 (en) | 1987-07-10 | 1987-07-10 | Discharge device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0795204B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1299306C (en) * | 1998-04-21 | 2007-02-07 | 松下电器产业株式会社 | Capacitor and its mfg. method |
-
1987
- 1987-07-10 JP JP17086587A patent/JPH0795204B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1299306C (en) * | 1998-04-21 | 2007-02-07 | 松下电器产业株式会社 | Capacitor and its mfg. method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0795204B2 (en) | 1995-10-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |