JPS6416904A - Inspection instrument for surface waviness - Google Patents

Inspection instrument for surface waviness

Info

Publication number
JPS6416904A
JPS6416904A JP17232687A JP17232687A JPS6416904A JP S6416904 A JPS6416904 A JP S6416904A JP 17232687 A JP17232687 A JP 17232687A JP 17232687 A JP17232687 A JP 17232687A JP S6416904 A JPS6416904 A JP S6416904A
Authority
JP
Japan
Prior art keywords
laser light
inspection
projected
measurement
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17232687A
Other languages
Japanese (ja)
Inventor
Shinichi Wakana
Munetoshi Inada
Yoshiaki Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP17232687A priority Critical patent/JPS6416904A/en
Publication of JPS6416904A publication Critical patent/JPS6416904A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To enable high-accuracy inspection by providing a function which adjusts a two-axial rotary mechanism direction changing mirror before measuring operation and removes the offset of an optical system. CONSTITUTION:Laser light 13a emitted by a semiconductor laser light source is projected on an object 11 to be measured which rotates at a high speed through the two-axial rotary mechanism direction changing mirror 26 by an optical lever method. Then reflected light 13c corresponding to the surface shape of the object 1 of measurement is made incident on a four-division photodetector 27 and processed electrically through a photoelectric converting circuit 15, a differential amplifier circuit 16a, differentiation circuits 16b and 16c, etc., to inspect the waviness of the surface of the object 11 of measurement. Further, the laser light 13a is projected on a some reference surface before the inspection and its reflected light 13c is adjusted through the mirror 26 to eliminate the offset quantity of the optical system. Thus, the high-accuracy inspection is performed.
JP17232687A 1987-07-10 1987-07-10 Inspection instrument for surface waviness Pending JPS6416904A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17232687A JPS6416904A (en) 1987-07-10 1987-07-10 Inspection instrument for surface waviness

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17232687A JPS6416904A (en) 1987-07-10 1987-07-10 Inspection instrument for surface waviness

Publications (1)

Publication Number Publication Date
JPS6416904A true JPS6416904A (en) 1989-01-20

Family

ID=15939832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17232687A Pending JPS6416904A (en) 1987-07-10 1987-07-10 Inspection instrument for surface waviness

Country Status (1)

Country Link
JP (1) JPS6416904A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012063267A (en) * 2010-09-16 2012-03-29 Sankyu Inc Circular flange distortion amount measurement method and circular flange distortion amount measurement apparatus
CN103471532A (en) * 2013-09-10 2013-12-25 中国商用飞机有限责任公司 System for measuring the waviness of an aircraft surface and corresponding method
CN109238181A (en) * 2018-09-29 2019-01-18 昆明理工大学 A kind of elevator rail planeness detection system and method based on multistage optical lever

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5924819A (en) * 1982-08-03 1984-02-08 Ricoh Co Ltd Mechanism for aligning optical axis of interference measuring device
JPS62127618A (en) * 1985-11-29 1987-06-09 Fujitsu Ltd Measuring instrument for surface shape

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5924819A (en) * 1982-08-03 1984-02-08 Ricoh Co Ltd Mechanism for aligning optical axis of interference measuring device
JPS62127618A (en) * 1985-11-29 1987-06-09 Fujitsu Ltd Measuring instrument for surface shape

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012063267A (en) * 2010-09-16 2012-03-29 Sankyu Inc Circular flange distortion amount measurement method and circular flange distortion amount measurement apparatus
CN103471532A (en) * 2013-09-10 2013-12-25 中国商用飞机有限责任公司 System for measuring the waviness of an aircraft surface and corresponding method
CN109238181A (en) * 2018-09-29 2019-01-18 昆明理工大学 A kind of elevator rail planeness detection system and method based on multistage optical lever
CN109238181B (en) * 2018-09-29 2023-09-26 昆明理工大学 An elevator track flatness detection system and method based on multi-level light levers

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