JPS6418009A - Semiconductor position detector - Google Patents
Semiconductor position detectorInfo
- Publication number
- JPS6418009A JPS6418009A JP17422587A JP17422587A JPS6418009A JP S6418009 A JPS6418009 A JP S6418009A JP 17422587 A JP17422587 A JP 17422587A JP 17422587 A JP17422587 A JP 17422587A JP S6418009 A JPS6418009 A JP S6418009A
- Authority
- JP
- Japan
- Prior art keywords
- light
- light receiving
- out electrodes
- long
- signal leading
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title 1
- 239000012535 impurity Substances 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Measurement Of Optical Distance (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Light Receiving Elements (AREA)
- Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE:To enable the obtaining of higher resolutions on the long range side regardless of a larger ratio of long and short limit ranges, by a method wherein light from objects on the long and short range sides is made incident upon different light receiving areas as light spots and photo currents are outputted from signal leading-out electrodes of the respective light receiving areas. CONSTITUTION:A light receiving section [comprising (n) light receiving areas 521-522] is formed by diffusing P-type impurities evenly on the surface of a high resistance silicon substrate 51 while an n<+> type conductive layer 53 having n-type impurities diffused at a high density on the back thereof 51. When light from an object 3 to be measured is made incident upon the light receiving section of the apparatus 5 as light spot, the position of the light spot is detected based on photocurrent drawn from both ends thereof. Here, in the areas 521-52n, one pair each of signal leading-out electrodes 55a1-55an and 55b1-55bn is arranged in a row with one electrode thereof adjacent to the other and the interval of the respective signal leading-out electrodes is multiplied equally in sequence.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17422587A JPH0623653B2 (en) | 1987-07-13 | 1987-07-13 | Semiconductor position detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17422587A JPH0623653B2 (en) | 1987-07-13 | 1987-07-13 | Semiconductor position detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6418009A true JPS6418009A (en) | 1989-01-20 |
| JPH0623653B2 JPH0623653B2 (en) | 1994-03-30 |
Family
ID=15974911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17422587A Expired - Fee Related JPH0623653B2 (en) | 1987-07-13 | 1987-07-13 | Semiconductor position detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0623653B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023004069A (en) * | 2021-06-25 | 2023-01-17 | ローム株式会社 | Optical sensor and electronic apparatus |
-
1987
- 1987-07-13 JP JP17422587A patent/JPH0623653B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023004069A (en) * | 2021-06-25 | 2023-01-17 | ローム株式会社 | Optical sensor and electronic apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0623653B2 (en) | 1994-03-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |