JPS6418732U - - Google Patents
Info
- Publication number
- JPS6418732U JPS6418732U JP11300887U JP11300887U JPS6418732U JP S6418732 U JPS6418732 U JP S6418732U JP 11300887 U JP11300887 U JP 11300887U JP 11300887 U JP11300887 U JP 11300887U JP S6418732 U JPS6418732 U JP S6418732U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- utility
- model registration
- exhaust means
- cvd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000005380 borophosphosilicate glass Substances 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Control Of Temperature (AREA)
Description
第１図は本考案の一実施例の断面図、第２図は
従来例の断面図である。
１……ヘツド、３……石英板、４……可動サセ
プタ、５……熱電対、６……電気配線、７……自
動温度コントローラ、８……ポテンシヨメータ、
９……排気口、１０，１２ａ，１２ｂ……自動排
気調整弁、１１……ヒータ。
FIG. 1 is a sectional view of an embodiment of the present invention, and FIG. 2 is a sectional view of a conventional example. 1... Head, 3... Quartz plate, 4... Movable susceptor, 5... Thermocouple, 6... Electric wiring, 7... Automatic temperature controller, 8... Potentiometer,
9...Exhaust port, 10, 12a, 12b...Automatic exhaust adjustment valve, 11...Heater.
Claims (1)
ＢＳＧ膜を堆積させる際に、ウエハを搭載してい
る可動サセプタの両側からガスの排気を行う排気
手段を有するＣＶＤ装置において、 前記可動サセプタ上の指定位置の温度制御を行
う温度制御手段を備えたことを特徴とするＣＶＤ
装置。 (2) 前記排気手段は、調節可能にしたことを特
徴とする実用新案登録請求の範囲第１項記載のＣ
ＶＤ装置。[Claims for Utility Model Registration] (1) CVD having an exhaust means for exhausting gas from both sides of a movable susceptor on which a wafer is mounted when depositing a BPSG film or BSG film by ejecting gas onto the wafer. A CVD apparatus comprising: temperature control means for controlling the temperature of a specified position on the movable susceptor.
Device. (2) C according to claim 1 of the utility model registration claim, characterized in that the exhaust means is adjustable.
VD device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11300887U JPS6418732U (en) | 1987-07-22 | 1987-07-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11300887U JPS6418732U (en) | 1987-07-22 | 1987-07-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6418732U true JPS6418732U (en) | 1989-01-30 |
Family
ID=31352467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11300887U Pending JPS6418732U (en) | 1987-07-22 | 1987-07-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6418732U (en) |
-
1987
- 1987-07-22 JP JP11300887U patent/JPS6418732U/ja active Pending