JPS642037A - Photosensitive composition - Google Patents

Photosensitive composition

Info

Publication number
JPS642037A
JPS642037A JP15665287A JP15665287A JPS642037A JP S642037 A JPS642037 A JP S642037A JP 15665287 A JP15665287 A JP 15665287A JP 15665287 A JP15665287 A JP 15665287A JP S642037 A JPS642037 A JP S642037A
Authority
JP
Japan
Prior art keywords
formula
group
titled composition
polymer
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15665287A
Other languages
English (en)
Other versions
JPH012037A (ja
Inventor
Kanichi Yokota
Hideo Ai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Chemical Industry Co Ltd
Original Assignee
Asahi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Chemical Industry Co Ltd filed Critical Asahi Chemical Industry Co Ltd
Priority to JP15665287A priority Critical patent/JPS642037A/ja
Publication of JPH012037A publication Critical patent/JPH012037A/ja
Publication of JPS642037A publication Critical patent/JPS642037A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0387—Polyamides or polyimides

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
JP15665287A 1987-06-25 1987-06-25 Photosensitive composition Pending JPS642037A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15665287A JPS642037A (en) 1987-06-25 1987-06-25 Photosensitive composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15665287A JPS642037A (en) 1987-06-25 1987-06-25 Photosensitive composition

Publications (2)

Publication Number Publication Date
JPH012037A JPH012037A (ja) 1989-01-06
JPS642037A true JPS642037A (en) 1989-01-06

Family

ID=15632336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15665287A Pending JPS642037A (en) 1987-06-25 1987-06-25 Photosensitive composition

Country Status (1)

Country Link
JP (1) JPS642037A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7030170B2 (en) 2001-11-22 2006-04-18 Mitsui Chemicals, Inc. Photosensitive resin composition, dry film, and workpiece using the same
JP2008015060A (ja) * 2006-07-04 2008-01-24 Asahi Kasei Electronics Co Ltd 感光性ポリアミド酸エステル組成物
JP2022062795A (ja) * 2020-10-09 2022-04-21 東洋インキＳｃホールディングス株式会社 電子材料

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7030170B2 (en) 2001-11-22 2006-04-18 Mitsui Chemicals, Inc. Photosensitive resin composition, dry film, and workpiece using the same
JP2008015060A (ja) * 2006-07-04 2008-01-24 Asahi Kasei Electronics Co Ltd 感光性ポリアミド酸エステル組成物
JP2022062795A (ja) * 2020-10-09 2022-04-21 東洋インキＳｃホールディングス株式会社 電子材料

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