JPS6420681A - Apparatus for oscillating gas laser - Google Patents

Apparatus for oscillating gas laser

Info

Publication number
JPS6420681A
JPS6420681A JP17622587A JP17622587A JPS6420681A JP S6420681 A JPS6420681 A JP S6420681A JP 17622587 A JP17622587 A JP 17622587A JP 17622587 A JP17622587 A JP 17622587A JP S6420681 A JPS6420681 A JP S6420681A
Authority
JP
Japan
Prior art keywords
cavity
space
gas laser
discharge
main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17622587A
Other languages
Japanese (ja)
Inventor
Shigeyuki Takagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP17622587A priority Critical patent/JPS6420681A/en
Publication of JPS6420681A publication Critical patent/JPS6420681A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To stabilize a main discharge between main electrodes, and to speed up operation, by forming a cavity in one of a pair of main electrodes of an apparatus for oscillating gas laser, and by disposing the head of a pre-discharge electrode in the cavity, thereby the chemical products, which are produced by pre-ionization through the pre-discharge electrode, being forced to be discharged into the space other than the cavity. CONSTITUTION:The gases for laser admitted into a laser tube 1 of a gas laser apparatus are so circulated by a blower 6 for circulation as to pass through a discharge space 7 formed between an upper and a lower holding plates 2, 3. In this space 7, a main stroke is formed by a pair of a cathode 4 and an anode 5 which are holded on the plates 2 and 3 respectively. A cavity 13 is formed in the cathode 4, and the head of a pre-discharge electrode 12, which is connected to a high voltage supply 11, is disposed in the cavity 13. And, a step section 14 is formed in the inner face of the cavity 13, and a number of holes 8 are formed in a concave section 17 formed on the both sides of the step section 14. Moreover, the chemical products which are produced in the cavity 13 by pre-ionization through the electrode 12 are forced to be discharged through a ventilating hole 19 into the space other than the cavity 7.
JP17622587A 1987-07-15 1987-07-15 Apparatus for oscillating gas laser Pending JPS6420681A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17622587A JPS6420681A (en) 1987-07-15 1987-07-15 Apparatus for oscillating gas laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17622587A JPS6420681A (en) 1987-07-15 1987-07-15 Apparatus for oscillating gas laser

Publications (1)

Publication Number Publication Date
JPS6420681A true JPS6420681A (en) 1989-01-24

Family

ID=16009816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17622587A Pending JPS6420681A (en) 1987-07-15 1987-07-15 Apparatus for oscillating gas laser

Country Status (1)

Country Link
JP (1) JPS6420681A (en)

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