JPS6420726U - - Google Patents
Info
- Publication number
- JPS6420726U JPS6420726U JP11470387U JP11470387U JPS6420726U JP S6420726 U JPS6420726 U JP S6420726U JP 11470387 U JP11470387 U JP 11470387U JP 11470387 U JP11470387 U JP 11470387U JP S6420726 U JPS6420726 U JP S6420726U
- Authority
- JP
- Japan
- Prior art keywords
- brush
- rotating brush
- semiconductor wafer
- scrubber device
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005406 washing Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11470387U JPS6420726U (et) | 1987-07-27 | 1987-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11470387U JPS6420726U (et) | 1987-07-27 | 1987-07-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6420726U true JPS6420726U (et) | 1989-02-01 |
Family
ID=31355693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11470387U Pending JPS6420726U (et) | 1987-07-27 | 1987-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6420726U (et) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5544780A (en) * | 1978-09-27 | 1980-03-29 | Toshiba Corp | Cleaning device for semiconductor wafer |
-
1987
- 1987-07-27 JP JP11470387U patent/JPS6420726U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5544780A (en) * | 1978-09-27 | 1980-03-29 | Toshiba Corp | Cleaning device for semiconductor wafer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0245632U (et) | ||
| JPS61135757U (et) | ||
| JPS622466U (et) | ||
| JPS6346841U (et) | ||
| JPH02142527U (et) | ||
| JPS63123140U (et) | ||
| JPS62134549U (et) | ||
| JPS61109136U (et) | ||
| JPS61158621U (et) | ||
| JPS5964036U (ja) | 水流を利用した自動洗車ブラシ | |
| JPS6232533U (et) | ||
| JPH0247031U (et) | ||
| JPS6342226U (et) | ||
| JPS62170156U (et) | ||
| JPS59125356U (ja) | 敷物洗浄機 | |
| JPH0376549U (et) | ||
| JPS6376285U (et) | ||
| JPS60194335U (ja) | スクラパ−装置 | |
| JPS6456895U (et) | ||
| JPS63103757U (et) | ||
| JPS5840049U (ja) | 噴霧装置をとりつけた窓ガラスふき器 | |
| JPS63139861U (et) | ||
| JPS62134550U (et) | ||
| JPS6254660U (et) | ||
| JPH0335641U (et) |