JPS6421056A - Rigid film containing cubic boron nitride as main body - Google Patents
Rigid film containing cubic boron nitride as main bodyInfo
- Publication number
- JPS6421056A JPS6421056A JP17800487A JP17800487A JPS6421056A JP S6421056 A JPS6421056 A JP S6421056A JP 17800487 A JP17800487 A JP 17800487A JP 17800487 A JP17800487 A JP 17800487A JP S6421056 A JPS6421056 A JP S6421056A
- Authority
- JP
- Japan
- Prior art keywords
- film
- boron
- gamma
- main body
- electron beams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052582 BN Inorganic materials 0.000 title 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 title 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract 4
- 229910052796 boron Inorganic materials 0.000 abstract 4
- 238000010894 electron beam technology Methods 0.000 abstract 3
- 239000000203 mixture Substances 0.000 abstract 3
- 238000010891 electric arc Methods 0.000 abstract 1
- 239000008246 gaseous mixture Substances 0.000 abstract 1
- 238000007733 ion plating Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To produce a rigid BN film having specified composition, especially a rigid film contg. cubic BN as a main body at comparatively low temp. by utilizing discharge caused in the gaseous atmosphere consisting of combination contg. vapor of boron, boride-base gas, N2 and NH3. CONSTITUTION:After exhausting the inside of a vacuum vessel 1 of an ion plating device at the prescribed degree of vacuum, the atmosphere having the prescribed pressure is formed by introducing a gaseous mixture of N2/Ar or N2 and CH4/Ar through a pip 9. Then boron is evaporated by projecting electron beams to boron enclosed in a crucible. Further the amount of boron to be evaporated is changed by previously changing the output of electron beams under the conditions of constant partial pressure of N2 or N2 and CH4 and thereby it is calculated that composition of a film is changed to what extent and regulation of a stoichiometric ratio gamma in the film is preformed by controlling the output of electron beams based on its result. The rigid film contg. cubic NB having the composition shown in a formula as a main body is formed on a substrate 3 by starting arc discharge. Wherein in the formula, x+y+z=1, gamma: 0.4-0.5, y.gamma: 0-0.25, z.gamma=0-0.05.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17800487A JPS6421056A (en) | 1987-07-16 | 1987-07-16 | Rigid film containing cubic boron nitride as main body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17800487A JPS6421056A (en) | 1987-07-16 | 1987-07-16 | Rigid film containing cubic boron nitride as main body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6421056A true JPS6421056A (en) | 1989-01-24 |
Family
ID=16040870
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17800487A Pending JPS6421056A (en) | 1987-07-16 | 1987-07-16 | Rigid film containing cubic boron nitride as main body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6421056A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5425574A (en) * | 1992-08-19 | 1995-06-20 | Mitsubishi Jidosha Kogyo Kabushiki Kaisha | Anti-skid braking method and system |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61157674A (en) * | 1984-12-29 | 1986-07-17 | Agency Of Ind Science & Technol | Manufacture of high hardness boron nitride film |
-
1987
- 1987-07-16 JP JP17800487A patent/JPS6421056A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61157674A (en) * | 1984-12-29 | 1986-07-17 | Agency Of Ind Science & Technol | Manufacture of high hardness boron nitride film |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5425574A (en) * | 1992-08-19 | 1995-06-20 | Mitsubishi Jidosha Kogyo Kabushiki Kaisha | Anti-skid braking method and system |
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