JPS6421741U - - Google Patents
Info
- Publication number
- JPS6421741U JPS6421741U JP11418487U JP11418487U JPS6421741U JP S6421741 U JPS6421741 U JP S6421741U JP 11418487 U JP11418487 U JP 11418487U JP 11418487 U JP11418487 U JP 11418487U JP S6421741 U JPS6421741 U JP S6421741U
- Authority
- JP
- Japan
- Prior art keywords
- viewing port
- port section
- kovar
- stainless steel
- viewing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910000833 kovar Inorganic materials 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 229910000838 Al alloy Inorganic materials 0.000 claims description 2
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 238000003466 welding Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Pressure Vessels And Lids Thereof (AREA)
Description
第１図は本考案の実施例を、第２図ａ，ｂ，ｃ
は真空装置用ビユーイングポート部の説明図を、
第３図ａ，ｂは従来例を、第４図、第５図は本考
案の他の実施例を、それぞれ示している。
２……ステンレス鋼材、４……アルミニウム合
金、６……コバール、８……コバールガラス窓、
ＥＢＷ……電子ビーム溶接。
Figure 1 shows an embodiment of the present invention, Figure 2 a, b, c
is an explanatory diagram of the viewing port section for vacuum equipment,
3a and 3b show a conventional example, and FIGS. 4 and 5 show other embodiments of the present invention, respectively. 2... Stainless steel material, 4... Aluminum alloy, 6... Kovar, 8... Kovar glass window,
EBW...electron beam welding.
Claims (1)
同径のアルミニウム合金とステンレス鋼材との接
合体から成るフランジ部と、コバール胴体および
該コバール胴体と熱膨張係数がほぼ等しい透明体
からなる窓とから構成なり、前記接合部材のステ
ンレス鋼材部と前記ビユーイング部とを電子ビー
ム溶接して構成したこと特徴とする真空装置のビ
ユーイングポート部。 In the viewing port section for vacuum equipment,
It is composed of a flange portion made of a joined body of aluminum alloy and stainless steel materials having the same diameter, a Kovar body, and a window made of a transparent body whose coefficient of thermal expansion is approximately the same as that of the Kovar body, and the stainless steel material portion of the joining member and the A viewing port section of a vacuum device characterized in that the viewing port section and the viewing section are constructed by electron beam welding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987114184U JPH0515944Y2 (en) | 1987-07-24 | 1987-07-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987114184U JPH0515944Y2 (en) | 1987-07-24 | 1987-07-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6421741U true JPS6421741U (en) | 1989-02-03 |
| JPH0515944Y2 JPH0515944Y2 (en) | 1993-04-27 |
Family
ID=31354700
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987114184U Expired - Lifetime JPH0515944Y2 (en) | 1987-07-24 | 1987-07-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0515944Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019081685A (en) * | 2017-10-30 | 2019-05-30 | 株式会社ウショー技研 | Window structure formed by joining glass or ceramic with metal, and manufacturing method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61159035U (en) * | 1985-03-22 | 1986-10-02 |
-
1987
- 1987-07-24 JP JP1987114184U patent/JPH0515944Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61159035U (en) * | 1985-03-22 | 1986-10-02 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019081685A (en) * | 2017-10-30 | 2019-05-30 | 株式会社ウショー技研 | Window structure formed by joining glass or ceramic with metal, and manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0515944Y2 (en) | 1993-04-27 |