JPS642176U - - Google Patents

Info

Publication number
JPS642176U
JPS642176U JP9706087U JP9706087U JPS642176U JP S642176 U JPS642176 U JP S642176U JP 9706087 U JP9706087 U JP 9706087U JP 9706087 U JP9706087 U JP 9706087U JP S642176 U JPS642176 U JP S642176U
Authority
JP
Japan
Prior art keywords
chamber
temperature
constant
sample
circulation path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9706087U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9706087U priority Critical patent/JPS642176U/ja
Publication of JPS642176U publication Critical patent/JPS642176U/ja
Pending legal-status Critical Current

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  • Testing Of Individual Semiconductor Devices (AREA)
  • Sampling And Sample Adjustment (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、この考案の結露発生装置の一例を示
す断面図、第2図は槽1からの雰囲気循環状態を
示す要部の断面図、第3図は装置の正面図である
。 1……低温恒温槽、2……恒温恒湿槽、3……
試料収納室、4,5……循環路、6,7,8,9
……シヤツター、10,11……送風機、12…
…操作パネル、13……収納室の出入口、14…
…扉、16……断熱壁。
FIG. 1 is a cross-sectional view showing an example of the dew condensation generating device of this invention, FIG. 2 is a cross-sectional view of the main part showing the state of atmosphere circulation from the tank 1, and FIG. 3 is a front view of the device. 1...Low temperature constant temperature chamber, 2...Constant temperature and humidity chamber, 3...
Sample storage chamber, 4, 5...Circulation path, 6, 7, 8, 9
...Shutter, 10,11...Blower, 12...
...Operation panel, 13...Storage room entrance/exit, 14...
...door, 16...insulated wall.

Claims (1)

【実用新案登録請求の範囲】 (1) 試料の冷却温度に管理される低温恒温槽と
、多湿雰囲気の恒温恒湿槽と、試料収納室と、上
記低温恒温槽と恒温恒湿槽の各々を試料収納室に
接続する槽内雰囲気の循環路と、この循環路の各
槽との連絡口を開閉するシヤツターと、循環路内
に設けた送風機とを具備し、上記試料室内に、上
記2つの槽の内部雰囲気を交互に循環させる如く
構成された試料への結露発生装置。 (2) 上記低温恒温槽と恒温恒湿槽の間に上記試
料収納室が存在し、さらに、この試料収納室の両
側に、各槽との連絡口を上記シヤツターで開閉す
る共通循環路が各々存在し、その共通循環路の一
方に吹込み用の送風機が、他方に吸引用の送風機
が各々設けられていることを特徴とする実用新案
登録請求の範囲第(1)項記載の試料への結露発生
装置。 (3) 上記低温恒温槽の温度、恒温恒湿槽の温度
、湿度、槽内雰囲気の循環時間、シヤツターによ
る循環路の切換え回数の各条件を制御する制御部
と、制御条件を入力する操作パネルが含まれるこ
とを特徴とする実用新案登録請求の範囲第(1)項
又は第(2)項記載の試料への結露発生装置。
[Scope of Claim for Utility Model Registration] (1) A low temperature constant temperature chamber controlled by the cooling temperature of the sample, a constant temperature constant temperature chamber with a humid atmosphere, a sample storage chamber, and each of the above low temperature constant temperature chamber and constant temperature constant humidity chamber. It is equipped with a circulation path for the tank atmosphere connected to the sample storage chamber, a shutter that opens and closes the communication port between each tank of this circulation path, and a blower installed in the circulation path. A device for generating condensation on a sample configured to alternately circulate the internal atmosphere of a tank. (2) The above-mentioned sample storage chamber exists between the above-mentioned low-temperature and constant-temperature chamber and the constant-temperature and constant-humidity chamber, and furthermore, on both sides of this sample storage chamber, there are common circulation paths that open and close communication ports with each chamber using the above-mentioned shutters. A method for applying a sample to a sample according to claim (1) of the claims for utility model registration, characterized in that a blowing fan is provided on one side of the common circulation path and a suction blower is provided on the other side of the common circulation path. Condensation generator. (3) A control unit that controls various conditions such as the temperature of the low-temperature constant temperature chamber, the temperature and humidity of the constant temperature and humidity chamber, the circulation time of the atmosphere in the chamber, and the number of times the circulation path is switched by the shutter, and an operation panel that inputs the control conditions. An apparatus for generating dew condensation on a sample according to claim 1 or 2 of the utility model registration claim, characterized in that the apparatus includes:
JP9706087U 1987-06-23 1987-06-23 Pending JPS642176U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9706087U JPS642176U (en) 1987-06-23 1987-06-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9706087U JPS642176U (en) 1987-06-23 1987-06-23

Publications (1)

Publication Number Publication Date
JPS642176U true JPS642176U (en) 1989-01-09

Family

ID=30963589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9706087U Pending JPS642176U (en) 1987-06-23 1987-06-23

Country Status (1)

Country Link
JP (1) JPS642176U (en)

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