JPS6422770U - - Google Patents
Info
- Publication number
- JPS6422770U JPS6422770U JP1987115843U JP11584387U JPS6422770U JP S6422770 U JPS6422770 U JP S6422770U JP 1987115843 U JP1987115843 U JP 1987115843U JP 11584387 U JP11584387 U JP 11584387U JP S6422770 U JPS6422770 U JP S6422770U
- Authority
- JP
- Japan
- Prior art keywords
- light
- transmitting
- reactive gas
- transparent
- diameter portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987115843U JPS6422770U (pt) | 1987-07-30 | 1987-07-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987115843U JPS6422770U (pt) | 1987-07-30 | 1987-07-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6422770U true JPS6422770U (pt) | 1989-02-06 |
Family
ID=31357855
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987115843U Pending JPS6422770U (pt) | 1987-07-30 | 1987-07-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6422770U (pt) |
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1987
- 1987-07-30 JP JP1987115843U patent/JPS6422770U/ja active Pending