JPS6423121A - Weight detector - Google Patents

Abstract

PURPOSE:To obtain a detecting device of simple constitution which has superior shock resistance and high-accuracy scaling performance by fixing a sensor metallic fixture to a main body with screws across elastic body such as spring washers. CONSTITUTION:A substrate 9 made of a sintered body such as alumina and a diaphragm 8 made of a thin plane of an alumina sintered body face each other at a specific interval. Capacity electrodes 10 are formed on the opposite surfaces of the substrate 9 and diaphragm 8 and a glass seal 11 which couples the diaphragm 8 with the substrate 9 is provided at the outer peripheral parts of the electrodes 10. A load transmission means 7 is mounted on the diaphragm 8 nearby the center of the electrode and transmits an external load as a spot load to vary the electrostatic capacity of an electrostatic capacity detection type pressure sensor 19 with pressure applied to the surface of the diaphragm 8. The sensor 19 is mounted on a sensor mount base 14 while a gap is formed below the pressure sensing part of the substrate 9, and the sensor metallic fixture 16 which holds the mount base 14 is fitted to the main body 15 across the elastic bodies such as the spring washers 20. Consequently, an excessive load is prevented from being placed on the sensor 19.