JPS642316A - Plasma cvd device - Google Patents

Plasma cvd device

Info

Publication number
JPS642316A
JPS642316A JP15651787A JP15651787A JPS642316A JP S642316 A JPS642316 A JP S642316A JP 15651787 A JP15651787 A JP 15651787A JP 15651787 A JP15651787 A JP 15651787A JP S642316 A JPS642316 A JP S642316A
Authority
JP
Japan
Prior art keywords
supplied
gas
reaction gas
time
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15651787A
Other languages
English (en)
Other versions
JPH012316A (ja
Inventor
Shiyouzou Kusube
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP15651787A priority Critical patent/JPS642316A/ja
Publication of JPH012316A publication Critical patent/JPH012316A/ja
Publication of JPS642316A publication Critical patent/JPS642316A/ja
Pending legal-status Critical Current

Links

JP15651787A 1987-06-25 1987-06-25 Plasma cvd device Pending JPS642316A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15651787A JPS642316A (en) 1987-06-25 1987-06-25 Plasma cvd device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15651787A JPS642316A (en) 1987-06-25 1987-06-25 Plasma cvd device

Publications (2)

Publication Number Publication Date
JPH012316A JPH012316A (ja) 1989-01-06
JPS642316A true JPS642316A (en) 1989-01-06

Family

ID=15629512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15651787A Pending JPS642316A (en) 1987-06-25 1987-06-25 Plasma cvd device

Country Status (1)

Country Link
JP (1) JPS642316A (ja)

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