JPS6424352A - Energy analyzing device - Google Patents

Energy analyzing device

Info

Publication number
JPS6424352A
JPS6424352A JP62178863A JP17886387A JPS6424352A JP S6424352 A JPS6424352 A JP S6424352A JP 62178863 A JP62178863 A JP 62178863A JP 17886387 A JP17886387 A JP 17886387A JP S6424352 A JPS6424352 A JP S6424352A
Authority
JP
Japan
Prior art keywords
grid
secondary electrons
advancing direction
energy
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62178863A
Other languages
Japanese (ja)
Inventor
Kazuo Okubo
Akio Ito
Kazuyuki Ozaki
Toshihiro Ishizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62178863A priority Critical patent/JPS6424352A/en
Publication of JPS6424352A publication Critical patent/JPS6424352A/en
Pending legal-status Critical Current

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  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To improve the energy analyzing accuracy to the incident secondary electron by providing an electrode to correct the advancing direction of the secondary electron from the lower side first grid (drawing-out grid) to the upper side second grid (analyzing grid) to inject vertically constantly. CONSTITUTION:On the surface of a sample 13 to be tested, the primary electron beam 12 is irradiated, and to the secondary electron 14 released from the position, the first grid voltage V1 is applied to draw out the secondary electrons 14 upward by the first grid 9, and moreover, an electric field vertical to the advancing direction is applied by a correcting electrode 11 to which a correcting voltage V3 is applied, The secondary electrons 14 are injected vertically to the second grid 10 constantly. In this case, the energy of the secondary electrons 14 receives no influence because the direction of the electric field by the correcting electrode 11 is vertical to the advancing direction, and moreover, the incident angle of the secondary electrons 14 to the second grid 10 is made vertical. An accurate energy analysis can be carried out in the second grid 10 to which the second grid voltage V2 is applied accordingly.
JP62178863A 1987-07-20 1987-07-20 Energy analyzing device Pending JPS6424352A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62178863A JPS6424352A (en) 1987-07-20 1987-07-20 Energy analyzing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62178863A JPS6424352A (en) 1987-07-20 1987-07-20 Energy analyzing device

Publications (1)

Publication Number Publication Date
JPS6424352A true JPS6424352A (en) 1989-01-26

Family

ID=16056000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62178863A Pending JPS6424352A (en) 1987-07-20 1987-07-20 Energy analyzing device

Country Status (1)

Country Link
JP (1) JPS6424352A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0670943U (en) * 1990-12-28 1994-10-04 光生アルミニューム工業株式会社 Gravity mold casting equipment
JP2001035434A (en) * 1999-06-25 2001-02-09 Staib Instr Gmbh Image forming device for energy resolution and angular resolution electron spectral diffraction, method for it, and spectroscope

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0670943U (en) * 1990-12-28 1994-10-04 光生アルミニューム工業株式会社 Gravity mold casting equipment
JP2001035434A (en) * 1999-06-25 2001-02-09 Staib Instr Gmbh Image forming device for energy resolution and angular resolution electron spectral diffraction, method for it, and spectroscope

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