JPS6424830U - - Google Patents
Info
- Publication number
- JPS6424830U JPS6424830U JP11965187U JP11965187U JPS6424830U JP S6424830 U JPS6424830 U JP S6424830U JP 11965187 U JP11965187 U JP 11965187U JP 11965187 U JP11965187 U JP 11965187U JP S6424830 U JPS6424830 U JP S6424830U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- section
- gas
- cleaning
- gas jetting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
第１図及び第２図は本考案に係る板状物の搬送
装置の一実施例を示す斜視図と断面図、第３図及
び第４図は従来の板状物の搬送装置の斜視図と断
面図である。
１０……ウエハ、１６……洗浄薬液噴出部、２
０……空気噴出部、２２……洗浄薬液、２４……
純水、２６……加圧空気、傾斜開口部。
1 and 2 are a perspective view and a sectional view showing an embodiment of a conveying device for a plate-like object according to the present invention, and FIGS. 3 and 4 are perspective views and a cross-sectional view of a conventional conveying device for a plate-like object. FIG. 10...Wafer, 16...Cleaning chemical liquid spouting part, 2
0...Air jetting part, 22...Cleaning chemical solution, 24...
Pure water, 26...pressurized air, inclined opening.
Claims (1)
共に薬液処理部と洗浄部との間に板状物に気体噴
射する気体噴出部が設けられ、板状物を液体及び
気体の噴流で浮上させながら洗浄搬送する板状物
の洗浄装置に於いて、 前記気体噴出部は、薬液処理部側の気体噴出孔
が薬液処理部側に向けて傾斜して形成されたこと
を特徴とする板状物の洗浄装置。[Claims for Utility Model Registration] The plate-shaped object is transferred from the chemical treatment section to the cleaning section, and a gas jetting section is provided between the chemical treatment section and the cleaning section to inject gas to the plate-shaped object. In a cleaning device for a plate-like object that cleans and conveys a plate while floating it with a jet of liquid and gas, the gas jetting part is formed such that the gas jetting hole on the chemical liquid processing part side is inclined toward the chemical liquid processing part side. A cleaning device for plate-like objects, characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987119651U JPH069494Y2 (en) | 1987-08-04 | 1987-08-04 | Plate cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987119651U JPH069494Y2 (en) | 1987-08-04 | 1987-08-04 | Plate cleaning equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6424830U true JPS6424830U (en) | 1989-02-10 |
| JPH069494Y2 JPH069494Y2 (en) | 1994-03-09 |
Family
ID=31365064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987119651U Expired - Lifetime JPH069494Y2 (en) | 1987-08-04 | 1987-08-04 | Plate cleaning equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069494Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS587830A (en) * | 1981-07-08 | 1983-01-17 | Hitachi Ltd | Method and apparatus for cleaning flaky articles |
-
1987
- 1987-08-04 JP JP1987119651U patent/JPH069494Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS587830A (en) * | 1981-07-08 | 1983-01-17 | Hitachi Ltd | Method and apparatus for cleaning flaky articles |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH069494Y2 (en) | 1994-03-09 |
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