JPS6425747U - - Google Patents

Info

Publication number
JPS6425747U
JPS6425747U JP12024487U JP12024487U JPS6425747U JP S6425747 U JPS6425747 U JP S6425747U JP 12024487 U JP12024487 U JP 12024487U JP 12024487 U JP12024487 U JP 12024487U JP S6425747 U JPS6425747 U JP S6425747U
Authority
JP
Japan
Prior art keywords
focused light
probe
tested
board
projecting means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12024487U
Other languages
English (en)
Other versions
JPH0717023Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987120244U priority Critical patent/JPH0717023Y2/ja
Publication of JPS6425747U publication Critical patent/JPS6425747U/ja
Application granted granted Critical
Publication of JPH0717023Y2 publication Critical patent/JPH0717023Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Tests Of Electronic Circuits (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す構成説明図、
第２図は本考案の作用を説明する模式図、第３図
は本考案の第２の実施例を示す構成説明図、第４
図は本考案の第３の実施例を示す構成説明図、第
５図〜第７図は従来の装置を示す説明図である。 ３ａ……ＸＹ移動機構、３ｂ……プローブ、３
ｃ……基板保持枠、３ｄ……ＬＥＤランプ、３ｅ
……集束レンズ、３ｆ……焦点可変レンズ。

Claims (1)

  1. 【実用新案登録請求の範囲】 被検査基板を保持するテーブルと、該テーブル
    に沿つて移動するとともに、検査点に到達した時
    前記被検査基板に接触するプローブとを有したフ
    アンクシヨンテスタにおいて、 前記プローブと特定の関係位置に保持されると
    ともに、集束光を前記基板に照写する集束光照写
    手段を設けかつ、該集束光照写手段は大領域の集
    束光と微少領域の集束光とを照写可能な構造を有
    したことを特徴とするフアンクシヨンテスタ。
JP1987120244U 1987-08-04 1987-08-04 フアンクシヨンテスタ Expired - Lifetime JPH0717023Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987120244U JPH0717023Y2 (ja) 1987-08-04 1987-08-04 フアンクシヨンテスタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987120244U JPH0717023Y2 (ja) 1987-08-04 1987-08-04 フアンクシヨンテスタ

Publications (2)

Publication Number Publication Date
JPS6425747U true JPS6425747U (ja) 1989-02-13
JPH0717023Y2 JPH0717023Y2 (ja) 1995-04-19

Family

ID=31366183

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987120244U Expired - Lifetime JPH0717023Y2 (ja) 1987-08-04 1987-08-04 フアンクシヨンテスタ

Country Status (1)

Country Link
JP (1) JPH0717023Y2 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50135987A (ja) * 1974-01-12 1975-10-28
JPS54122167A (en) * 1978-03-15 1979-09-21 Fujitsu Ltd Probing mechanism

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50135987A (ja) * 1974-01-12 1975-10-28
JPS54122167A (en) * 1978-03-15 1979-09-21 Fujitsu Ltd Probing mechanism

Also Published As

Publication number Publication date
JPH0717023Y2 (ja) 1995-04-19

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