JPS64266A - Production of diamondlike carbon - Google Patents
Production of diamondlike carbonInfo
- Publication number
- JPS64266A JPS64266A JP62156091A JP15609187A JPS64266A JP S64266 A JPS64266 A JP S64266A JP 62156091 A JP62156091 A JP 62156091A JP 15609187 A JP15609187 A JP 15609187A JP S64266 A JPS64266 A JP S64266A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- gaseous
- diamondlike carbon
- diamondlike
- gases
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title abstract 5
- 229910052799 carbon Inorganic materials 0.000 title abstract 5
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000007789 gas Substances 0.000 abstract 5
- 239000000758 substrate Substances 0.000 abstract 5
- 238000000034 method Methods 0.000 abstract 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 1
- 238000010800 chemical transportation method Methods 0.000 abstract 1
- 238000005229 chemical vapour deposition Methods 0.000 abstract 1
- 239000008246 gaseous mixture Substances 0.000 abstract 1
- 229930195733 hydrocarbon Natural products 0.000 abstract 1
- 150000002430 hydrocarbons Chemical class 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
- 239000001257 hydrogen Substances 0.000 abstract 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 abstract 1
- 230000004936 stimulating effect Effects 0.000 abstract 1
- 238000007740 vapor deposition Methods 0.000 abstract 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
PURPOSE: To produce the title dense diamondlike carbon having excellent adhesion to a substrate with a simple operation by using CO and CO2 as the raw gases in the production process wherein the stimulated raw gases are brought into contact with the substrate.
CONSTITUTION: Gaseous CO and /or gaseous CO2 as the raw gases or the gaseous mixture with hydrogen are stimulated by an optional stimulating means among a CVD method such as a plasma CVD method and a chemical transportation method and an ionization vapor deposition method. The stimulated gases are brought into contact with the substrate, and diamondlike carbon or a diamondlike carbon film is formed on the surface of the substrate. By this method, the raw gaseous are easily prepared as compared with the method using hydrocarbons as the raw gases, the operation is simple, the adhesion to the substrate is excellent, and the dense diamondlike carbon or diamondlike film with improved hardness can be obtained.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62156091A JPS64266A (en) | 1987-06-23 | 1987-06-23 | Production of diamondlike carbon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62156091A JPS64266A (en) | 1987-06-23 | 1987-06-23 | Production of diamondlike carbon |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01266A JPH01266A (en) | 1989-01-05 |
| JPS64266A true JPS64266A (en) | 1989-01-05 |
Family
ID=15620112
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62156091A Pending JPS64266A (en) | 1987-06-23 | 1987-06-23 | Production of diamondlike carbon |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS64266A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02167892A (en) * | 1988-12-21 | 1990-06-28 | Ishizuka Kenkyusho:Kk | Synthetic device of diamond by gas-phase reaction |
| US5349922A (en) * | 1990-06-13 | 1994-09-27 | General Electric Company | Free standing diamond sheet and method and apparatus for making same |
| US5380516A (en) * | 1988-05-28 | 1995-01-10 | Sumitomo Electric Industries, Ltd. | Process for synthesizing diamond in a vapor phase |
| JP2009280876A (en) * | 2008-05-23 | 2009-12-03 | Masayoshi Umeno | Carbon film deposition method |
-
1987
- 1987-06-23 JP JP62156091A patent/JPS64266A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5380516A (en) * | 1988-05-28 | 1995-01-10 | Sumitomo Electric Industries, Ltd. | Process for synthesizing diamond in a vapor phase |
| US5624719A (en) * | 1988-05-28 | 1997-04-29 | Sumitomo Electric Industries, Ltd. | Process for synthesizing diamond in a vapor phase |
| JPH02167892A (en) * | 1988-12-21 | 1990-06-28 | Ishizuka Kenkyusho:Kk | Synthetic device of diamond by gas-phase reaction |
| US5349922A (en) * | 1990-06-13 | 1994-09-27 | General Electric Company | Free standing diamond sheet and method and apparatus for making same |
| JP2009280876A (en) * | 2008-05-23 | 2009-12-03 | Masayoshi Umeno | Carbon film deposition method |
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