JPS64266A - Production of diamondlike carbon - Google Patents

Production of diamondlike carbon

Info

Publication number: JPS64266A
Authority: JP; Japan
Prior art keywords: substrate; gaseous; diamondlike carbon; diamondlike; gases
Prior art date: 1987-06-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP62156091A

Other languages

English (en)

Other versions

JPH01266A (ja

Inventor

Osamu Nakamura

Tomio Kazahaya

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Idemitsu Petrochemical Co Ltd

Original Assignee

Idemitsu Petrochemical Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-06-23

Filing date

1987-06-23

Publication date

1989-01-05

1987-06-23 Application filed by Idemitsu Petrochemical Co Ltd filed Critical Idemitsu Petrochemical Co Ltd

1987-06-23 Priority to JP62156091A priority Critical patent/JPS64266A/ja

1989-01-05 Publication of JPH01266A publication Critical patent/JPH01266A/ja

1989-01-05 Publication of JPS64266A publication Critical patent/JPS64266A/ja

Status Pending legal-status Critical Current

Links

OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title abstract 5
229910052799 carbon Inorganic materials 0.000 title abstract 5
238000004519 manufacturing process Methods 0.000 title abstract 2
239000007789 gas Substances 0.000 abstract 5
239000000758 substrate Substances 0.000 abstract 5
238000000034 method Methods 0.000 abstract 3
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 1
238000010800 chemical transportation method Methods 0.000 abstract 1
238000005229 chemical vapour deposition Methods 0.000 abstract 1
239000008246 gaseous mixture Substances 0.000 abstract 1
229930195733 hydrocarbon Natural products 0.000 abstract 1
150000002430 hydrocarbons Chemical class 0.000 abstract 1
229910052739 hydrogen Inorganic materials 0.000 abstract 1
239000001257 hydrogen Substances 0.000 abstract 1
238000005268 plasma chemical vapour deposition Methods 0.000 abstract 1
230000004936 stimulating effect Effects 0.000 abstract 1
238000007740 vapor deposition Methods 0.000 abstract 1

Landscapes

Carbon And Carbon Compounds (AREA)
Chemical Vapour Deposition (AREA)
Crystals, And After-Treatments Of Crystals (AREA)

JP62156091A 1987-06-23 1987-06-23 Production of diamondlike carbon Pending JPS64266A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP62156091A JPS64266A (en)	1987-06-23	1987-06-23	Production of diamondlike carbon

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP62156091A JPS64266A (en)	1987-06-23	1987-06-23	Production of diamondlike carbon

Publications (2)

Publication Number	Publication Date
JPH01266A JPH01266A (ja)	1989-01-05
JPS64266A true JPS64266A (en)	1989-01-05

Family

ID=15620112

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP62156091A Pending JPS64266A (en)	1987-06-23	1987-06-23	Production of diamondlike carbon

Country Status (1)

Country	Link
JP (1)	JPS64266A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH02167892A (ja) *	1988-12-21	1990-06-28	Ishizuka Kenkyusho:Kk	気相反応によるダイヤモンド合成法
US5349922A (en) *	1990-06-13	1994-09-27	General Electric Company	Free standing diamond sheet and method and apparatus for making same
US5380516A (en) *	1988-05-28	1995-01-10	Sumitomo Electric Industries, Ltd.	Process for synthesizing diamond in a vapor phase
JP2009280876A (ja) *	2008-05-23	2009-12-03	Masayoshi Umeno	炭素膜形成方法

1987
- 1987-06-23 JP JP62156091A patent/JPS64266A/ja active Pending

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5380516A (en) *	1988-05-28	1995-01-10	Sumitomo Electric Industries, Ltd.	Process for synthesizing diamond in a vapor phase
US5624719A (en) *	1988-05-28	1997-04-29	Sumitomo Electric Industries, Ltd.	Process for synthesizing diamond in a vapor phase
JPH02167892A (ja) *	1988-12-21	1990-06-28	Ishizuka Kenkyusho:Kk	気相反応によるダイヤモンド合成法
US5349922A (en) *	1990-06-13	1994-09-27	General Electric Company	Free standing diamond sheet and method and apparatus for making same
JP2009280876A (ja) *	2008-05-23	2009-12-03	Masayoshi Umeno	炭素膜形成方法

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