JPS6427155A - Electric field forming device - Google Patents

Electric field forming device

Info

Publication number
JPS6427155A
JPS6427155A JP62182248A JP18224887A JPS6427155A JP S6427155 A JPS6427155 A JP S6427155A JP 62182248 A JP62182248 A JP 62182248A JP 18224887 A JP18224887 A JP 18224887A JP S6427155 A JPS6427155 A JP S6427155A
Authority
JP
Japan
Prior art keywords
electric field
electrode
borides
iva
carbides
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62182248A
Other languages
Japanese (ja)
Inventor
Atsushi Hayashi
Kiyoshi Shigeoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP62182248A priority Critical patent/JPS6427155A/en
Priority to EP88111694A priority patent/EP0300452B1/en
Priority to DE8888111694T priority patent/DE3866043D1/en
Publication of JPS6427155A publication Critical patent/JPS6427155A/en
Priority to US07/683,129 priority patent/US5102629A/en
Pending legal-status Critical Current

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  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To form a required electric field stably for a long time by forming at least the surface of an electrode for formation of electric field from electroconductive ceramic containing one or more of borides, carbides, nitrides of transition metals belonging to IVa, Va groups in amounts exceeding a specific vol% value. CONSTITUTION:Electroconductive ceramic is used for an electrode for forming electric field, wherein the ceramic shall contain one or more of borides, carbides, and nitrides of transition metals belonging to the IVa, Va groups at least in an amount over 30% by volume. This compound or compounds will generally have an electric conductivity of 10<4>-10<5>OMEGA<-1>cm<-1>, with no problem to serve as electrode. As it has covalent crystals as clear from its structure, possible damages because of electrons or other particles in the electric field are much less than any metal consisting merely of metal bonds. Because of higher chemical stability than metals, it is strong against oxidation and corrosion, and therefore hard to deteriorate.
JP62182248A 1987-07-23 1987-07-23 Electric field forming device Pending JPS6427155A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP62182248A JPS6427155A (en) 1987-07-23 1987-07-23 Electric field forming device
EP88111694A EP0300452B1 (en) 1987-07-23 1988-07-20 Field formation apparatus
DE8888111694T DE3866043D1 (en) 1987-07-23 1988-07-20 FIELD GENERATION DEVICE.
US07/683,129 US5102629A (en) 1987-07-23 1991-04-10 Field formation apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62182248A JPS6427155A (en) 1987-07-23 1987-07-23 Electric field forming device

Publications (1)

Publication Number Publication Date
JPS6427155A true JPS6427155A (en) 1989-01-30

Family

ID=16114936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62182248A Pending JPS6427155A (en) 1987-07-23 1987-07-23 Electric field forming device

Country Status (1)

Country Link
JP (1) JPS6427155A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02297853A (en) * 1989-02-28 1990-12-10 Tokyo Electron Ltd Electron beam exciting ion source

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02297853A (en) * 1989-02-28 1990-12-10 Tokyo Electron Ltd Electron beam exciting ion source

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