JPS64273A - Microwave plasma cvd device - Google Patents

Microwave plasma cvd device

Info

Publication number
JPS64273A
JPS64273A JP62153505A JP15350587A JPS64273A JP S64273 A JPS64273 A JP S64273A JP 62153505 A JP62153505 A JP 62153505A JP 15350587 A JP15350587 A JP 15350587A JP S64273 A JPS64273 A JP S64273A
Authority
JP
Japan
Prior art keywords
microwave
film forming
inlet part
inner diameter
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62153505A
Other languages
English (en)
Other versions
JPH01273A (ja
Inventor
Satoru Sugita
Shotaro Okabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62153505A priority Critical patent/JPS64273A/ja
Publication of JPH01273A publication Critical patent/JPH01273A/ja
Publication of JPS64273A publication Critical patent/JPS64273A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording-members for original recording by exposure, e.g. to light, to heat or to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Vapour Deposition (AREA)
  • Light Receiving Elements (AREA)
  • Photoreceptors In Electrophotography (AREA)
JP62153505A 1987-06-22 1987-06-22 Microwave plasma cvd device Pending JPS64273A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62153505A JPS64273A (en) 1987-06-22 1987-06-22 Microwave plasma cvd device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62153505A JPS64273A (en) 1987-06-22 1987-06-22 Microwave plasma cvd device

Publications (2)

Publication Number Publication Date
JPH01273A JPH01273A (ja) 1989-01-05
JPS64273A true JPS64273A (en) 1989-01-05

Family

ID=15564018

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62153505A Pending JPS64273A (en) 1987-06-22 1987-06-22 Microwave plasma cvd device

Country Status (1)

Country Link
JP (1) JPS64273A (ja)

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