JPS6427677U - - Google Patents
Info
- Publication number
- JPS6427677U JPS6427677U JP12271287U JP12271287U JPS6427677U JP S6427677 U JPS6427677 U JP S6427677U JP 12271287 U JP12271287 U JP 12271287U JP 12271287 U JP12271287 U JP 12271287U JP S6427677 U JPS6427677 U JP S6427677U
- Authority
- JP
- Japan
- Prior art keywords
- movable mirror
- frame
- heater
- objective lens
- fixed part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 4
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Mounting And Adjusting Of Optical Elements (AREA)
Description
第１図はこの考案の一実施例を示す概念図、第
２図はこの考案の一実施例を示す断面図、第３図
は従来の光学装置を示す概念図、第４図は従来の
光学装置を示す断面図である。
図において１は対物レンズ、２は可動ミラー、
３は固定ミラー、４は光学センサ、５はフレーム
、６は軸受、７は固定部、８はヒータ、９は姿勢
センサ、１０は位置検出器、１１は軸、１２は軸
受、１３はモータ、１４は姿勢センサ、１５は位
置検出器、１６は形状記憶合金、１７はヒータ、
１８は軸受ホルダ、１９は防振材である。なお、
図中同一符号は同一または相当部分を示す。
Fig. 1 is a conceptual diagram showing an embodiment of this invention, Fig. 2 is a sectional view showing an embodiment of this invention, Fig. 3 is a conceptual diagram showing a conventional optical device, and Fig. 4 is a conceptual diagram showing an embodiment of this invention. FIG. 2 is a cross-sectional view showing the device. In the figure, 1 is an objective lens, 2 is a movable mirror,
3 is a fixed mirror, 4 is an optical sensor, 5 is a frame, 6 is a bearing, 7 is a fixed part, 8 is a heater, 9 is an attitude sensor, 10 is a position detector, 11 is a shaft, 12 is a bearing, 13 is a motor, 14 is a posture sensor, 15 is a position detector, 16 is a shape memory alloy, 17 is a heater,
18 is a bearing holder, and 19 is a vibration isolator. In addition,
The same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
を保持するためのフレームと、このフレーム内に
配置される可動ミラーと、この可動ミラーと上記
フレームとを各々回転自由に支持する固定部と、
上記可動ミラーに取付けられた姿勢センサとから
なる光学装置において、上記フレームをモータで
駆動し、かつ防振材を介して上記可動ミラーを上
記固定部で支持するとともに、上記フレームと上
記可動ミラーとをヒータを有する形状記憶合金で
接続し、上記姿勢センサの信号をフイードバツク
し上記ヒータを加熱することにより、形状記憶合
金が変形させ、上記可動ミラーが駆動されるよう
に構成したことを特徴とする光学装置。 an objective lens for condensing light, a frame for holding the objective lens, a movable mirror disposed within the frame, and a fixed part that rotatably supports each of the movable mirror and the frame;
In an optical device comprising an attitude sensor attached to the movable mirror, the frame is driven by a motor, the movable mirror is supported by the fixed part via a vibration isolator, and the frame and the movable mirror are connected together. are connected by a shape memory alloy having a heater, and by feeding back the signal of the attitude sensor and heating the heater, the shape memory alloy is deformed and the movable mirror is driven. optical equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12271287U JPS6427677U (en) | 1987-08-11 | 1987-08-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12271287U JPS6427677U (en) | 1987-08-11 | 1987-08-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6427677U true JPS6427677U (en) | 1989-02-17 |
Family
ID=31370897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12271287U Pending JPS6427677U (en) | 1987-08-11 | 1987-08-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6427677U (en) |
-
1987
- 1987-08-11 JP JP12271287U patent/JPS6427677U/ja active Pending