JPS6428528A - Highly sensitive semiconductor pressure sensor - Google Patents
Highly sensitive semiconductor pressure sensorInfo
- Publication number
- JPS6428528A JPS6428528A JP18222687A JP18222687A JPS6428528A JP S6428528 A JPS6428528 A JP S6428528A JP 18222687 A JP18222687 A JP 18222687A JP 18222687 A JP18222687 A JP 18222687A JP S6428528 A JPS6428528 A JP S6428528A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- pressure
- columnar protrusion
- pressure sensor
- highly sensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 3
- 229910052710 silicon Inorganic materials 0.000 abstract 3
- 239000010703 silicon Substances 0.000 abstract 3
- 238000001514 detection method Methods 0.000 abstract 2
- 239000012530 fluid Substances 0.000 abstract 2
- 230000035945 sensitivity Effects 0.000 abstract 2
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE:To enable detection of even a fine pressure with a sensitivity greatly heightened, by providing a second diaphragm to impart a pressure received therewith to a silicon diaphragm as intensively concentrated load through a columnar protrusion. CONSTITUTION:The tip of a columnar protrusion 6a of a second diaphragm 6 is made to abut the center of a silicon diaphragm 1. The circumference of the diaphragm 6 is fastened on a case 3 and a space section 8 composes a pressure chamber of a fluid. When a pressure fluid is introduced from an introduction port 7a, the second diaphragm 6 deflects to meet an introduction pressure so that an intensive load is added to the silicon diaphragm 1 through the columnar protrusion 6a. A distortion of the diaphragm 1 is detected by a piezo resistance effect as voltage output. This heightens the sensitivity greatly thereby enabling detection of even a fine pressure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18222687A JPS6428528A (en) | 1987-07-24 | 1987-07-24 | Highly sensitive semiconductor pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18222687A JPS6428528A (en) | 1987-07-24 | 1987-07-24 | Highly sensitive semiconductor pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6428528A true JPS6428528A (en) | 1989-01-31 |
Family
ID=16114548
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18222687A Pending JPS6428528A (en) | 1987-07-24 | 1987-07-24 | Highly sensitive semiconductor pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6428528A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02216024A (en) * | 1989-02-17 | 1990-08-28 | Philip Sensor Technol Kk | Superfine pressure sensor |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57147024A (en) * | 1981-03-07 | 1982-09-10 | Kyowa Dengiyou:Kk | Assembly of diaphragm and strain inducer for signal converter |
| JPS6024428A (en) * | 1983-07-21 | 1985-02-07 | Kinseki Kk | pressure sensor |
-
1987
- 1987-07-24 JP JP18222687A patent/JPS6428528A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57147024A (en) * | 1981-03-07 | 1982-09-10 | Kyowa Dengiyou:Kk | Assembly of diaphragm and strain inducer for signal converter |
| JPS6024428A (en) * | 1983-07-21 | 1985-02-07 | Kinseki Kk | pressure sensor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02216024A (en) * | 1989-02-17 | 1990-08-28 | Philip Sensor Technol Kk | Superfine pressure sensor |
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