JPS6429560U - - Google Patents

Info

Publication number
JPS6429560U
JPS6429560U JP12503987U JP12503987U JPS6429560U JP S6429560 U JPS6429560 U JP S6429560U JP 12503987 U JP12503987 U JP 12503987U JP 12503987 U JP12503987 U JP 12503987U JP S6429560 U JPS6429560 U JP S6429560U
Authority
JP
Japan
Prior art keywords
diameter gear
small
slide shaft
drive source
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12503987U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12503987U priority Critical patent/JPS6429560U/ja
Publication of JPS6429560U publication Critical patent/JPS6429560U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Transmission Devices (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の減速進退装置の一実施例を
示す進退機構の断面図、第２図はプローブチヤツ
ク部分の断面図、第３図はその平面図、第４図は
ウエハプローバの概略斜視図、第５図はプロービ
ングを行なう際のフローチヤートである。 ２１……ウエハチヤツク、２３……ウエハ、２
５……ウエハ載置ステージ、２７……プローブカ
ード取付台、２９……カードチヤツク、３０……
スライドガイド、３１……プローブカード、３２
……スライド部、３３……プローブ針、３４……
ロボツトハンド、３５……ストツカ、３６……支
柱、４１……交換用リング、４３……ウオームギ
ア、４５……ギア、Ｍ……モータ。

Claims (1)

    【実用新案登録請求の範囲】
  1. モータ等の駆動源と、駆動源によつて回転する
    長尺で小径の歯車と、この小径の歯車にかみ合つ
    て回転し、小径の歯車と平行なスライド軸を突設
    した大径の歯車と、スライド軸を進退自在に螺着
    してスライド軸の先端を突出させたハウジングと
    を有することを特徴とする減速進退装置。
JP12503987U 1987-08-17 1987-08-17 Pending JPS6429560U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12503987U JPS6429560U (ja) 1987-08-17 1987-08-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12503987U JPS6429560U (ja) 1987-08-17 1987-08-17

Publications (1)

Publication Number Publication Date
JPS6429560U true JPS6429560U (ja) 1989-02-22

Family

ID=31375289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12503987U Pending JPS6429560U (ja) 1987-08-17 1987-08-17

Country Status (1)

Country Link
JP (1) JPS6429560U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008175326A (ja) * 2007-01-19 2008-07-31 Honda Motor Co Ltd アクチュエータ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS533136A (en) * 1976-06-30 1978-01-12 Nec Corp Diagnosis extending unit
JPS5620731A (en) * 1979-07-27 1981-02-26 Aisan Ind Co Ltd Flow rate control device for internal combustion engine

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS533136A (en) * 1976-06-30 1978-01-12 Nec Corp Diagnosis extending unit
JPS5620731A (en) * 1979-07-27 1981-02-26 Aisan Ind Co Ltd Flow rate control device for internal combustion engine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008175326A (ja) * 2007-01-19 2008-07-31 Honda Motor Co Ltd アクチュエータ

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