JPS6430365U - - Google Patents
Info
- Publication number
- JPS6430365U JPS6430365U JP12247287U JP12247287U JPS6430365U JP S6430365 U JPS6430365 U JP S6430365U JP 12247287 U JP12247287 U JP 12247287U JP 12247287 U JP12247287 U JP 12247287U JP S6430365 U JPS6430365 U JP S6430365U
- Authority
- JP
- Japan
- Prior art keywords
- graphite crucible
- crucible
- divided
- chamfer
- surround
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- 229910002804 graphite Inorganic materials 0.000 claims description 5
- 239000010439 graphite Substances 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- 230000013011 mating Effects 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第１図は、本考案のるつぼの斜視図、第２図ａ
は第１図のるつぼの平面図、第２図ｂは第２図ａ
のＡ部の拡大図で、使用後の状態を示し、第３図
ａは従来の黒鉛るつぼの平面図、第３図ｂは第３
図ａのＢ部の拡大図で、使用後の状態を示す。 １……黒鉛るつぼ、２……分割部の合せ目、３
……面取り部、４……Ｓｉの湯滴と盛り上り。
は第１図のるつぼの平面図、第２図ｂは第２図ａ
のＡ部の拡大図で、使用後の状態を示し、第３図
ａは従来の黒鉛るつぼの平面図、第３図ｂは第３
図ａのＢ部の拡大図で、使用後の状態を示す。 １……黒鉛るつぼ、２……分割部の合せ目、３
……面取り部、４……Ｓｉの湯滴と盛り上り。
Claims (1)
- シリコン単結晶引上げ用石英るつぼ本体の外部
を包囲し、保護する分割可能な黒鉛るつぼにおい
て、該黒鉛るつぼの分割部分の合せ面の外側部に
面取り部を設けたことを特徴とするシリコン単結
晶引上げ用黒鉛るつぼ。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987122472U JPH0519337Y2 (ja) | 1987-08-12 | 1987-08-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987122472U JPH0519337Y2 (ja) | 1987-08-12 | 1987-08-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6430365U true JPS6430365U (ja) | 1989-02-23 |
| JPH0519337Y2 JPH0519337Y2 (ja) | 1993-05-21 |
Family
ID=31370437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987122472U Expired - Lifetime JPH0519337Y2 (ja) | 1987-08-12 | 1987-08-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0519337Y2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008169096A (ja) * | 2007-01-15 | 2008-07-24 | Sumco Corp | カーボンルツボ |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58190892A (ja) * | 1982-04-28 | 1983-11-07 | Nippon Carbon Co Ltd | シリコン単結晶引上げ用黒鉛るつぼ |
| JPS6159673U (ja) * | 1984-09-20 | 1986-04-22 |
-
1987
- 1987-08-12 JP JP1987122472U patent/JPH0519337Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58190892A (ja) * | 1982-04-28 | 1983-11-07 | Nippon Carbon Co Ltd | シリコン単結晶引上げ用黒鉛るつぼ |
| JPS6159673U (ja) * | 1984-09-20 | 1986-04-22 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008169096A (ja) * | 2007-01-15 | 2008-07-24 | Sumco Corp | カーボンルツボ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0519337Y2 (ja) | 1993-05-21 |