JPS6430366U - - Google Patents

Info

Publication number
JPS6430366U
JPS6430366U JP12247387U JP12247387U JPS6430366U JP S6430366 U JPS6430366 U JP S6430366U JP 12247387 U JP12247387 U JP 12247387U JP 12247387 U JP12247387 U JP 12247387U JP S6430366 U JPS6430366 U JP S6430366U
Authority
JP
Japan
Prior art keywords
graphite crucible
silicon single
single crystals
pulling silicon
sealing material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12247387U
Other languages
English (en)
Other versions
JPH0519338Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12247387U priority Critical patent/JPH0519338Y2/ja
Publication of JPS6430366U publication Critical patent/JPS6430366U/ja
Application granted granted Critical
Publication of JPH0519338Y2 publication Critical patent/JPH0519338Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Description

【図面の簡単な説明】
第１図は黒鉛るつぼの斜視図、第２図ａは本考
案の一例の黒鉛るつぼの合せ目内側面Ｒ部にシー
ル材の当て板を設けた状態の説明図、第２図ｂは
第２図ａの黒鉛るつぼ分割部分の右側の側面図、
第３図ａは本考案の他の例の黒鉛るつぼの斜視図
、第３図ｂは第３図ａの黒鉛るつぼの分割部分の
右側の側面図、第３図ｃは第３図ｂのＡ部の拡大
図である。 １……黒鉛るつぼ、２……分割部分の合せ目、
３……シール材の当て板、４……当て板埋込み溝
、５……シール材、６……シール材の埋込み溝。

Claims (1)

    【実用新案登録請求の範囲】
  1. シリコン単結晶引上げ用石英るつぼ本体の外部
    を包囲し保護する分割可能な黒鉛るつぼにおいて
    、該黒鉛るつぼ分割部分の合せ目の少くとも一部
    分をシール材で封止したことを特徴とするシリコ
    ン単結晶引上げ用黒鉛るつぼ。
JP12247387U 1987-08-12 1987-08-12 Expired - Lifetime JPH0519338Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12247387U JPH0519338Y2 (ja) 1987-08-12 1987-08-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12247387U JPH0519338Y2 (ja) 1987-08-12 1987-08-12

Publications (2)

Publication Number Publication Date
JPS6430366U true JPS6430366U (ja) 1989-02-23
JPH0519338Y2 JPH0519338Y2 (ja) 1993-05-21

Family

ID=31370439

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12247387U Expired - Lifetime JPH0519338Y2 (ja) 1987-08-12 1987-08-12

Country Status (1)

Country Link
JP (1) JPH0519338Y2 (ja)

Also Published As

Publication number Publication date
JPH0519338Y2 (ja) 1993-05-21

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