JPS6431412A - Formation of ohmic contact electrode layer and device therefor - Google Patents

Formation of ohmic contact electrode layer and device therefor

Info

Publication number
JPS6431412A
JPS6431412A JP18744187A JP18744187A JPS6431412A JP S6431412 A JPS6431412 A JP S6431412A JP 18744187 A JP18744187 A JP 18744187A JP 18744187 A JP18744187 A JP 18744187A JP S6431412 A JPS6431412 A JP S6431412A
Authority
JP
Japan
Prior art keywords
contact
semiconductor substrate
heating body
metallic layer
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18744187A
Other languages
English (en)
Other versions
JP2579490B2 (ja
Inventor
Yasuaki Yamane
Masahiro Hirayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP18744187A priority Critical patent/JP2579490B2/ja
Publication of JPS6431412A publication Critical patent/JPS6431412A/ja
Application granted granted Critical
Publication of JP2579490B2 publication Critical patent/JP2579490B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP18744187A 1987-07-27 1987-07-27 オ−ム接触電極層形成法及びそれに用いる装置 Expired - Lifetime JP2579490B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18744187A JP2579490B2 (ja) 1987-07-27 1987-07-27 オ−ム接触電極層形成法及びそれに用いる装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18744187A JP2579490B2 (ja) 1987-07-27 1987-07-27 オ−ム接触電極層形成法及びそれに用いる装置

Publications (2)

Publication Number Publication Date
JPS6431412A true JPS6431412A (en) 1989-02-01
JP2579490B2 JP2579490B2 (ja) 1997-02-05

Family

ID=16206117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18744187A Expired - Lifetime JP2579490B2 (ja) 1987-07-27 1987-07-27 オ−ム接触電極層形成法及びそれに用いる装置

Country Status (1)

Country Link
JP (1) JP2579490B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05267309A (ja) * 1992-03-19 1993-10-15 Ngk Insulators Ltd 加熱装置
US5923427A (en) * 1997-07-10 1999-07-13 Banner Engineering Corporation Optical triangulation distance sensing system and method using a position sensitive detector and an automatic power controlled light source
US6122039A (en) * 1998-10-28 2000-09-19 Banner Engineering Corp. Method and apparatus to detect and report object displacement utilizing optical triangulation principles

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05267309A (ja) * 1992-03-19 1993-10-15 Ngk Insulators Ltd 加熱装置
US5923427A (en) * 1997-07-10 1999-07-13 Banner Engineering Corporation Optical triangulation distance sensing system and method using a position sensitive detector and an automatic power controlled light source
US6122039A (en) * 1998-10-28 2000-09-19 Banner Engineering Corp. Method and apparatus to detect and report object displacement utilizing optical triangulation principles

Also Published As

Publication number Publication date
JP2579490B2 (ja) 1997-02-05

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