JPS5776461A - Device for maintaining constant temperature of flat body - Google Patents

Device for maintaining constant temperature of flat body

Info

Publication number
JPS5776461A
JPS5776461A JP15220880A JP15220880A JPS5776461A JP S5776461 A JPS5776461 A JP S5776461A JP 15220880 A JP15220880 A JP 15220880A JP 15220880 A JP15220880 A JP 15220880A JP S5776461 A JPS5776461 A JP S5776461A
Authority
JP
Japan
Prior art keywords
plate
flat body
temp
thermomodules
maintained
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15220880A
Other languages
Japanese (ja)
Other versions
JPS6334989B2 (en
Inventor
Tomoshiro Horiguchi
Toshio Yokota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Ushio Inc
Original Assignee
Ushio Denki KK
Ushio Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK, Ushio Inc filed Critical Ushio Denki KK
Priority to JP15220880A priority Critical patent/JPS5776461A/en
Publication of JPS5776461A publication Critical patent/JPS5776461A/en
Publication of JPS6334989B2 publication Critical patent/JPS6334989B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2642—Testing semiconductor operation lifetime or reliability, e.g. by accelerated life tests

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

PURPOSE:To maintain the entire part of a flat body having large area stably at a desired constant temp. by using a holding plate consisting of a good heat conductor provided with chucking holes, thermomodules and fluid flow passages. CONSTITUTION:A flat body to be the object is placed on a holding plate 2, and said body is held in tight contact with the surface 1 of the plate 2 by driving the decompressing mechanisms connected to chucking holes 3. While water is flowed into water flow passages 7, an electric current supplying mechanism is driven to supply the electric current of the magnitude corresponding to the difference between the temp. measured by the thermometers buried in the plate 2 and a set temp. to thermomodules 6. Thereby, the plate 2 is maintained at the set temp. and the state of the flat body is maintained at the constant temp. state equal to that of the plate 2 for an arbitrary time.
JP15220880A 1980-10-31 1980-10-31 Device for maintaining constant temperature of flat body Granted JPS5776461A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15220880A JPS5776461A (en) 1980-10-31 1980-10-31 Device for maintaining constant temperature of flat body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15220880A JPS5776461A (en) 1980-10-31 1980-10-31 Device for maintaining constant temperature of flat body

Publications (2)

Publication Number Publication Date
JPS5776461A true JPS5776461A (en) 1982-05-13
JPS6334989B2 JPS6334989B2 (en) 1988-07-13

Family

ID=15535425

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15220880A Granted JPS5776461A (en) 1980-10-31 1980-10-31 Device for maintaining constant temperature of flat body

Country Status (1)

Country Link
JP (1) JPS5776461A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0460723U (en) * 1990-10-03 1992-05-25

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441078A (en) * 1977-09-08 1979-03-31 Kobatoron Kk Device for inspecting semiconductor
JPS5521158A (en) * 1978-08-01 1980-02-15 Nec Corp Checking method for semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441078A (en) * 1977-09-08 1979-03-31 Kobatoron Kk Device for inspecting semiconductor
JPS5521158A (en) * 1978-08-01 1980-02-15 Nec Corp Checking method for semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0460723U (en) * 1990-10-03 1992-05-25

Also Published As

Publication number Publication date
JPS6334989B2 (en) 1988-07-13

Similar Documents

Publication Publication Date Title
JPS5757470A (en) Device for supplying and exhausting liquid to and from margin of flat fuel battery electrode and electrode element provided in said device and fuel battery
SE7713192L (en) PROCEDURE AND APPLIANCE FOR POWERLESS METALIZATION
ES2046228T3 (en) PROCEDURE AND DEVICE FOR RAPID HEATING OF AN ELECTRICAL HEATING DEVICE.
JPS5776461A (en) Device for maintaining constant temperature of flat body
NO853341L (en) DEVICE FOR ENERGY SAVING HEATING IN CAR AND BAAT.
GB1411959A (en) Fluid-heating system including an electrode heating-vessel
ES419385A1 (en) Heating apparatus
JPS5524476A (en) Laser oscillator
JPS57102327A (en) Heater for barrel of injection molding machine
JPS53129656A (en) Heating method of fixing roll
JPS57188364A (en) Liquid temperature controller
ATE89900T1 (en) DOUBLE VALVE WITH TWO INLETS AND OUTLETS FOR MIXING TWO DIFFERENT TEMPERATURE CONTROLLED LIQUID FLOW.
JPS6446454A (en) Electronic water pillow apparatus
ES8203151A1 (en) Level control for brake fluid in motor vehicles.
JPS57169316A (en) Sealing apparatus
JPS5779974A (en) Heat fixing device
JPS55121671A (en) Waste heat utilizing type forcibly cooled heat sink
NL192632B (en) Air heating device.
JPS648926A (en) Heat-sensitive apparatus
JPS52107784A (en) Semiconductor unit
JPS57212503A (en) Thermo-module driving circuit
JPS574344A (en) Die device for press
JPS6473264A (en) Temperature controller
JPS57203269A (en) Cleaning device for recording medium
JPS5217638A (en) Heat-processed power board