JPS6431419A - Wafer rotation device - Google Patents

Wafer rotation device

Info

Publication number
JPS6431419A
JPS6431419A JP62187959A JP18795987A JPS6431419A JP S6431419 A JPS6431419 A JP S6431419A JP 62187959 A JP62187959 A JP 62187959A JP 18795987 A JP18795987 A JP 18795987A JP S6431419 A JPS6431419 A JP S6431419A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
element formation
formation parts
photoresist
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62187959A
Other languages
Japanese (ja)
Inventor
Hajime Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62187959A priority Critical patent/JPS6431419A/en
Publication of JPS6431419A publication Critical patent/JPS6431419A/en
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To hold a semiconductor wafer without its direct contact with element formation parts of a semiconductor wafer and coat both sides of the semiconductor wafer simultaneously with photoresist liquid, by providing a holding means to fix to and hold the semiconductor wafer to a rotating stand, supporting it at parts other than the element formation parts. CONSTITUTION:A semiconductor wafer 11 comprising element formation parts 11a and 11b is attracted and held by wafer contact surfaces 3 which are divided into branches from a spinner head mainframe 1. As the wafer contact surfaces 3 only come into contact with just only partial sections of the peripheral part of the semiconductor wafer 11, its configuration does not interfere the coating of photoresist towards the element formation parts at all. Subsequently, photoresist solutions A and B adhere to the element formation parts 11a and 11b at the same time. And the rotation of semiconductor wafer 11 at high speed permits the photoresist solutions A and B to spread all the area of the element formation parts 11a and 11b and to coat them simultaneously.
JP62187959A 1987-07-27 1987-07-27 Wafer rotation device Pending JPS6431419A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62187959A JPS6431419A (en) 1987-07-27 1987-07-27 Wafer rotation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62187959A JPS6431419A (en) 1987-07-27 1987-07-27 Wafer rotation device

Publications (1)

Publication Number Publication Date
JPS6431419A true JPS6431419A (en) 1989-02-01

Family

ID=16215159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62187959A Pending JPS6431419A (en) 1987-07-27 1987-07-27 Wafer rotation device

Country Status (1)

Country Link
JP (1) JPS6431419A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10204028A1 (en) * 2002-01-10 2003-08-14 Vitaphone Gmbh O 7 18 Telemetry of bio-signals through short messaging via mobile phone network, converts electronic communications received, into speech

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10204028A1 (en) * 2002-01-10 2003-08-14 Vitaphone Gmbh O 7 18 Telemetry of bio-signals through short messaging via mobile phone network, converts electronic communications received, into speech

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