JPS6433009A - Production of aluminum nitride - Google Patents

Production of aluminum nitride

Info

Publication number
JPS6433009A
JPS6433009A JP62187703A JP18770387A JPS6433009A JP S6433009 A JPS6433009 A JP S6433009A JP 62187703 A JP62187703 A JP 62187703A JP 18770387 A JP18770387 A JP 18770387A JP S6433009 A JPS6433009 A JP S6433009A
Authority
JP
Japan
Prior art keywords
aluminum nitride
org
solvent
gas atmosphere
precipitate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62187703A
Other languages
Japanese (ja)
Inventor
Takao Tanaka
Atsuhiko Hiai
Masao Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP62187703A priority Critical patent/JPS6433009A/en
Priority to EP88112181A priority patent/EP0301529B1/en
Priority to DE8888112181T priority patent/DE3871013D1/en
Priority to US07/226,021 priority patent/US4869925A/en
Priority to KR1019880009646A priority patent/KR910001820B1/en
Publication of JPS6433009A publication Critical patent/JPS6433009A/en
Priority to US07/393,493 priority patent/US4983462A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To inexpensively obtain the title high-purity aluminum nitride having a low content of residual carbon by allowing an org. Al compd. to react with aminotriazines in an org. solvent, separating the formed precipitate, and heating the precipitate at higher than a specified temp. in a nonoxidizing gas atmosphere. CONSTITUTION:An org. aluminum compd. (e.g., triethylaluminum) is allowed to react with aminotriazines (e.g., melamine) in an org. solvent (e.g., heptane). The formed aluminum nitride precursor precipitate is separated from the solvent, and heated at >=600 deg.C in a nonoxidizing gas atmosphere to obtain the desired aluminum nitride. The obtained aluminum nitride is appropriately used for the production of an AlN board to be used in the field of microelectronics. When the residual carbon content is to be further lowered, the aluminum nitride is successively heated at >=1000 deg.C in an oxidizing gas atmosphere.
JP62187703A 1987-07-29 1987-07-29 Production of aluminum nitride Pending JPS6433009A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP62187703A JPS6433009A (en) 1987-07-29 1987-07-29 Production of aluminum nitride
EP88112181A EP0301529B1 (en) 1987-07-29 1988-07-28 Method for preparing aluminum nitride and its sinter
DE8888112181T DE3871013D1 (en) 1987-07-29 1988-07-28 METHOD FOR THE EXTRACTION OF ALUMINUM NITRIDE AND SINTER PRODUCT PRODUCED THEREOF.
US07/226,021 US4869925A (en) 1987-07-29 1988-07-29 Method for preparing aluminum nitride and its sinter
KR1019880009646A KR910001820B1 (en) 1987-07-29 1988-07-29 Process for preparation of aluminium nitride and its sintered body
US07/393,493 US4983462A (en) 1987-07-29 1989-08-14 Method for preparing aluminum nitride and its sinter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62187703A JPS6433009A (en) 1987-07-29 1987-07-29 Production of aluminum nitride

Publications (1)

Publication Number Publication Date
JPS6433009A true JPS6433009A (en) 1989-02-02

Family

ID=16210683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62187703A Pending JPS6433009A (en) 1987-07-29 1987-07-29 Production of aluminum nitride

Country Status (1)

Country Link
JP (1) JPS6433009A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008299210A (en) * 2007-06-01 2008-12-11 Olympus Corp Interference objective lens and interference microscope apparatus provided with the interference objective lens

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008299210A (en) * 2007-06-01 2008-12-11 Olympus Corp Interference objective lens and interference microscope apparatus provided with the interference objective lens

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