JPS6433743U - - Google Patents
Info
- Publication number
- JPS6433743U JPS6433743U JP1987127767U JP12776787U JPS6433743U JP S6433743 U JPS6433743 U JP S6433743U JP 1987127767 U JP1987127767 U JP 1987127767U JP 12776787 U JP12776787 U JP 12776787U JP S6433743 U JPS6433743 U JP S6433743U
- Authority
- JP
- Japan
- Prior art keywords
- tray
- semiconductor wafer
- hole
- semiconductor
- gas supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987127767U JPS6433743U (fr) | 1987-08-21 | 1987-08-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987127767U JPS6433743U (fr) | 1987-08-21 | 1987-08-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6433743U true JPS6433743U (fr) | 1989-03-02 |
Family
ID=31380489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987127767U Pending JPS6433743U (fr) | 1987-08-21 | 1987-08-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6433743U (fr) |
-
1987
- 1987-08-21 JP JP1987127767U patent/JPS6433743U/ja active Pending