JPS6434155U - - Google Patents
Info
- Publication number
- JPS6434155U JPS6434155U JP1987129725U JP12972587U JPS6434155U JP S6434155 U JPS6434155 U JP S6434155U JP 1987129725 U JP1987129725 U JP 1987129725U JP 12972587 U JP12972587 U JP 12972587U JP S6434155 U JPS6434155 U JP S6434155U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- horizontal
- carrier
- doughnut
- nickel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 2
- 229910000838 Al alloy Inorganic materials 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 238000007772 electroless plating Methods 0.000 claims 1
- 239000012050 conventional carrier Substances 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Description
第１図は本考案の第一実施例を示す平面図、第
２図は本考案の第二実施例を示す平面図、第３図
は水平ポリツシユ盤の構造を示す部分断面図、そ
して、第４図は従来のキヤリアを示す平面図であ
る。
１：下定盤、２，１０，２０：キヤリア、３：
基板、４：上定盤、５，１１，２１：穴。
FIG. 1 is a plan view showing a first embodiment of the present invention, FIG. 2 is a plan view showing a second embodiment of the present invention, FIG. 3 is a partial sectional view showing the structure of a horizontal polishing plate, and FIG. FIG. 4 is a plan view showing a conventional carrier. 1: Lower surface plate, 2, 10, 20: Carrier, 3:
Substrate, 4: Upper surface plate, 5, 11, 21: Holes.
Claims (1)
ル・リン合金層を無電解めつき法にて付与した磁
気デイスク用基板を研磨する水平ポリツシユ盤に
おいて、被研磨物のキヤリアに研磨カス排出口を
設けたことを特徴とする水平ポリツシユ盤のキヤ
リア。 In a horizontal polishing machine for polishing a magnetic disk substrate in which a nickel-phosphorous alloy layer is applied by electroless plating on a doughnut-shaped aluminum alloy disk, a polishing scum discharge port is provided in the carrier of the polished object. A horizontal polishing plate carrier featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987129725U JPS6434155U (en) | 1987-08-26 | 1987-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987129725U JPS6434155U (en) | 1987-08-26 | 1987-08-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6434155U true JPS6434155U (en) | 1989-03-02 |
Family
ID=31384266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987129725U Pending JPS6434155U (en) | 1987-08-26 | 1987-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6434155U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000035630A1 (en) * | 1998-12-14 | 2000-06-22 | Seiko Epson Corporation | Polishing carrier, surface polishing device, and surface polishing method |
-
1987
- 1987-08-26 JP JP1987129725U patent/JPS6434155U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000035630A1 (en) * | 1998-12-14 | 2000-06-22 | Seiko Epson Corporation | Polishing carrier, surface polishing device, and surface polishing method |
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