JPS6434536U - - Google Patents
Info
- Publication number
- JPS6434536U JPS6434536U JP12989987U JP12989987U JPS6434536U JP S6434536 U JPS6434536 U JP S6434536U JP 12989987 U JP12989987 U JP 12989987U JP 12989987 U JP12989987 U JP 12989987U JP S6434536 U JPS6434536 U JP S6434536U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- vacuum chamber
- gauge
- vacuum gauge
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Measuring Fluid Pressure (AREA)
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12989987U JPS6434536U (2) | 1987-08-26 | 1987-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12989987U JPS6434536U (2) | 1987-08-26 | 1987-08-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6434536U true JPS6434536U (2) | 1989-03-02 |
Family
ID=31384597
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12989987U Pending JPS6434536U (2) | 1987-08-26 | 1987-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6434536U (2) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57199929A (en) * | 1981-06-03 | 1982-12-08 | Fujitsu Ltd | Vacuum gage for sputtering device |
-
1987
- 1987-08-26 JP JP12989987U patent/JPS6434536U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57199929A (en) * | 1981-06-03 | 1982-12-08 | Fujitsu Ltd | Vacuum gage for sputtering device |
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