JPS6437046U - - Google Patents
Info
- Publication number
- JPS6437046U JPS6437046U JP1987131371U JP13137187U JPS6437046U JP S6437046 U JPS6437046 U JP S6437046U JP 1987131371 U JP1987131371 U JP 1987131371U JP 13137187 U JP13137187 U JP 13137187U JP S6437046 U JPS6437046 U JP S6437046U
- Authority
- JP
- Japan
- Prior art keywords
- adhesive sheet
- ring
- wafer ring
- wafer
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987131371U JPS6437046U (fr) | 1987-08-31 | 1987-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987131371U JPS6437046U (fr) | 1987-08-31 | 1987-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6437046U true JPS6437046U (fr) | 1989-03-06 |
Family
ID=31387373
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987131371U Pending JPS6437046U (fr) | 1987-08-31 | 1987-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6437046U (fr) |
-
1987
- 1987-08-31 JP JP1987131371U patent/JPS6437046U/ja active Pending