JPS6437608U - - Google Patents
Info
- Publication number
- JPS6437608U JPS6437608U JP13217287U JP13217287U JPS6437608U JP S6437608 U JPS6437608 U JP S6437608U JP 13217287 U JP13217287 U JP 13217287U JP 13217287 U JP13217287 U JP 13217287U JP S6437608 U JPS6437608 U JP S6437608U
- Authority
- JP
- Japan
- Prior art keywords
- light
- objective lens
- deviation amount
- electric field
- field strength
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 2
- 230000003321 amplification Effects 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 2
- 230000005684 electric field Effects 0.000 claims 2
- 238000003199 nucleic acid amplification method Methods 0.000 claims 2
- 230000000694 effects Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Measurement Of Optical Distance (AREA)
- Optical Recording Or Reproduction (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Description
第１図は本考案の一実施例を示すグロツク図、
第２図はドライブアンプとその周辺回路の一例を
示す回路図、第３図はその変位と出力との関係を
示すグラフ、第４図は本考案の第２実施例を示す
ブロツク図、第５図は本考案の第３実施例を示す
ブロツク図、第６図は従来の光学式変位センサの
一例を示す図、第７図はその変位と電圧信号を示
す図である。
１……半導体レーザ、２……ハーフミラー、３
……対物レンズ、４……ナイフエツジ、５……２
分割フオトダイオード、５ａ，５ｂ……受光領域
、６……誤差増幅器、７……積分回路、８……ド
ライブアンプ、９……アツテネータ、１０ａ，１
０ｂ……透明電極、１１……測定物体、２１……
パルス発振回路、２２……サンプルホールド回路
、３１，３２……集光レンズ。
FIG. 1 is a graphic diagram showing an embodiment of the present invention.
FIG. 2 is a circuit diagram showing an example of a drive amplifier and its peripheral circuit, FIG. 3 is a graph showing the relationship between its displacement and output, FIG. 4 is a block diagram showing a second embodiment of the present invention, and FIG. FIG. 6 is a block diagram showing a third embodiment of the present invention, FIG. 6 is a diagram showing an example of a conventional optical displacement sensor, and FIG. 7 is a diagram showing its displacement and voltage signals. 1...Semiconductor laser, 2...Half mirror, 3
...Objective lens, 4...Knife edge, 5...2
Divided photodiode, 5a, 5b... Light receiving area, 6... Error amplifier, 7... Integrating circuit, 8... Drive amplifier, 9... Attenuator, 10a, 1
0b...Transparent electrode, 11...Measurement object, 21...
Pulse oscillation circuit, 22... sample hold circuit, 31, 32... condensing lens.
Claims (1)
る材料で形成され電界強度変化によつて焦点位置
を変化させ、前記投光手段より与えられる光を物
体面上に焦点を結ばせるよう集束する対物レンズ
と、 前記対物レンズより得られる反射光に基づいて
物体表面と物体に集光した光の焦点との偏差量を
検出する偏差量検出手段と、 前記偏差量検出手段より得られる偏差量信号を
増幅して前記対物レンズに与える電界強度を変化
させる増幅手段と、を具備し、 前記増幅手段の増幅出力に基づいて物体までの
変位信号とすることを特徴とする光学式変位セン
サ。[Claims for Utility Model Registration] A light projecting means, and light provided by the light projecting means, which is formed of a material having transparent electrodes on both sides and has an electro-optic effect, and whose focal position changes according to changes in electric field strength. an objective lens that focuses the light on the object surface, and a deviation amount detection means that detects the amount of deviation between the object surface and the focal point of the light focused on the object based on the reflected light obtained from the objective lens. , amplification means for amplifying the deviation amount signal obtained from the deviation amount detection means to change the electric field strength applied to the objective lens, and generating a displacement signal up to the object based on the amplified output of the amplification means. An optical displacement sensor characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13217287U JPS6437608U (en) | 1987-08-28 | 1987-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13217287U JPS6437608U (en) | 1987-08-28 | 1987-08-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6437608U true JPS6437608U (en) | 1989-03-07 |
Family
ID=31388894
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13217287U Pending JPS6437608U (en) | 1987-08-28 | 1987-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6437608U (en) |
-
1987
- 1987-08-28 JP JP13217287U patent/JPS6437608U/ja active Pending
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