JPS6437688U - - Google Patents

Info

Publication number
JPS6437688U
JPS6437688U JP13248187U JP13248187U JPS6437688U JP S6437688 U JPS6437688 U JP S6437688U JP 13248187 U JP13248187 U JP 13248187U JP 13248187 U JP13248187 U JP 13248187U JP S6437688 U JPS6437688 U JP S6437688U
Authority
JP
Japan
Prior art keywords
detection unit
lid member
sample
counting device
metal case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13248187U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13248187U priority Critical patent/JPS6437688U/ja
Publication of JPS6437688U publication Critical patent/JPS6437688U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Description

【図面の簡単な説明】
第１図は本考案の電子計数装置における電子検
出部の一実施例を示した断面図、第２図は第１図
の組立分解図、第３図は従来例を示した説明図で
ある。 ３：陽極、４：第１のグリツド電極、５：第２
のグリツド電極、１２：検出部本体、１３：中心
導体、１４：絶縁チユーブ、１５：外部導体、１
６：内側絶縁筒部材、１７：ネジ部、１８：外側
絶縁筒部材、１９：ネジ穴、２０：トツプカバー
、２１：ビス、２２：カソード電極、２４：支柱
、２５：蓋部材、２６：回路基板、２７：通し穴
、２８，２９：コネクタ装着穴、３０：ガイド片
、３２：金属ケース、３４：ビス、３６：ネジ穴
、３８：通し穴。

Claims (1)

  1. 【実用新案登録請求の範囲】 試料に光を照射し、該試料から放出される電子
    を電子検出部内に導入して電子の数を計数する電
    子計数装置に於いて、 前記電子検出部を、リング状の陽極、カソード
    電極及びグリツド電極を下方に検出窓を有する絶
    縁筐体内に備えた検出部本体と、該検出部本体の
    上部に植設され軸方向に延在された複数本の支柱
    の先端に支持された円盤状の蓋部材と、前記検出
    部本体及び前記支柱で支持された蓋部材の外側を
    覆つて装着される着脱自在な円筒状の金属ケース
    とで構成し、該金属ケース内の前記支柱延在部に
    回路基板を収納したことを特徴とする電子計数装
    置。
JP13248187U 1987-08-31 1987-08-31 Pending JPS6437688U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13248187U JPS6437688U (ja) 1987-08-31 1987-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13248187U JPS6437688U (ja) 1987-08-31 1987-08-31

Publications (1)

Publication Number Publication Date
JPS6437688U true JPS6437688U (ja) 1989-03-07

Family

ID=31389481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13248187U Pending JPS6437688U (ja) 1987-08-31 1987-08-31

Country Status (1)

Country Link
JP (1) JPS6437688U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0593505U (ja) * 1992-05-13 1993-12-21 有限会社シーエム技研 回転補助器

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60262005A (ja) * 1984-06-09 1985-12-25 Rikagaku Kenkyusho 膜厚計測方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60262005A (ja) * 1984-06-09 1985-12-25 Rikagaku Kenkyusho 膜厚計測方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0593505U (ja) * 1992-05-13 1993-12-21 有限会社シーエム技研 回転補助器

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