JPS6437687U - - Google Patents

Info

Publication number
JPS6437687U
JPS6437687U JP13098187U JP13098187U JPS6437687U JP S6437687 U JPS6437687 U JP S6437687U JP 13098187 U JP13098187 U JP 13098187U JP 13098187 U JP13098187 U JP 13098187U JP S6437687 U JPS6437687 U JP S6437687U
Authority
JP
Japan
Prior art keywords
sample
optical fiber
counting device
electronic counting
electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13098187U
Other languages
English (en)
Other versions
JPH0526484Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13098187U priority Critical patent/JPH0526484Y2/ja
Publication of JPS6437687U publication Critical patent/JPS6437687U/ja
Application granted granted Critical
Publication of JPH0526484Y2 publication Critical patent/JPH0526484Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示した説明図、第
２，３図は本考案の他の実施例を示した説明図、
第４図は従来例を示した説明図である。 １：試料、２：電子検出部、３：検出窓、９：
光フアイバー、１０：被覆、１１：フアイバー芯
線、１２：外カバー、１３：検出部本体、１４：
中心導体、１５：絶縁チユーブ、１６：外部導体
、１８，２０：絶縁筒部材、１９：ネジ部、２１
：ネジ穴、２２：カソード電極、２３：第１のグ
リツド電極、２４：トツプカバー、２５：第２の
グリツド電極、２６：金属シールド。

Claims (1)

  1. 【実用新案登録請求の範囲】 光源からの光を光フアイバーにより導いて試料
    に照射し、該試料から放出される電子を電子検出
    部内に導入して電子の数を計数する電子計数装置
    に於いて、 前記光フアイバーの先端外周に金属シールドを
    施して接地接続したことを特徴とする電子計数装
    置。
JP13098187U 1987-08-28 1987-08-28 Expired - Lifetime JPH0526484Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13098187U JPH0526484Y2 (ja) 1987-08-28 1987-08-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13098187U JPH0526484Y2 (ja) 1987-08-28 1987-08-28

Publications (2)

Publication Number Publication Date
JPS6437687U true JPS6437687U (ja) 1989-03-07
JPH0526484Y2 JPH0526484Y2 (ja) 1993-07-05

Family

ID=31386630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13098187U Expired - Lifetime JPH0526484Y2 (ja) 1987-08-28 1987-08-28

Country Status (1)

Country Link
JP (1) JPH0526484Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013129209A1 (ja) * 2012-03-01 2013-09-06 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013129209A1 (ja) * 2012-03-01 2013-09-06 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP2013182760A (ja) * 2012-03-01 2013-09-12 Hitachi High-Technologies Corp 荷電粒子線装置
US9330883B2 (en) 2012-03-01 2016-05-03 Hitachi High-Technologies Corporation Charged particle beam device

Also Published As

Publication number Publication date
JPH0526484Y2 (ja) 1993-07-05

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