JPS6438172A - Method for forming film - Google Patents

Method for forming film

Info

Publication number
JPS6438172A
JPS6438172A JP19280487A JP19280487A JPS6438172A JP S6438172 A JPS6438172 A JP S6438172A JP 19280487 A JP19280487 A JP 19280487A JP 19280487 A JP19280487 A JP 19280487A JP S6438172 A JPS6438172 A JP S6438172A
Authority
JP
Japan
Prior art keywords
film
substrate
uniform
treated
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19280487A
Other languages
Japanese (ja)
Other versions
JPH0714500B2 (en
Inventor
Yoshihiro Yamamoto
Masayoshi Shimamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyodo Printing Co Ltd
Original Assignee
Kyodo Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyodo Printing Co Ltd filed Critical Kyodo Printing Co Ltd
Priority to JP62192804A priority Critical patent/JPH0714500B2/en
Publication of JPS6438172A publication Critical patent/JPS6438172A/en
Publication of JPH0714500B2 publication Critical patent/JPH0714500B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

PURPOSE:To form a uniform and stable film in a short time by treating one surface of a substrate with a solution containing film composing material and then forming a uniform film of film material on the treated surface through the clearance between the substrate and a coating member. CONSTITUTION:One surface of the substrate is treated by using the solution containing the material to form the film. The film of nearly uniform thickness is formed all over one surface of the surface-treated substrate using a coater possible to supply prescribed film material in layers on the substrate through the clearance between the substrate and the coating member. When this method is applied, leveling after coating can be stably conducted to securely form a uniform film even in coating liquid which is defective in wettability. Since the leveling is fast, the time to the next stage is so short that the stage can be reduced.
JP62192804A 1987-07-31 1987-07-31 Method of forming coating Expired - Fee Related JPH0714500B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62192804A JPH0714500B2 (en) 1987-07-31 1987-07-31 Method of forming coating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62192804A JPH0714500B2 (en) 1987-07-31 1987-07-31 Method of forming coating

Publications (2)

Publication Number Publication Date
JPS6438172A true JPS6438172A (en) 1989-02-08
JPH0714500B2 JPH0714500B2 (en) 1995-02-22

Family

ID=16297265

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62192804A Expired - Fee Related JPH0714500B2 (en) 1987-07-31 1987-07-31 Method of forming coating

Country Status (1)

Country Link
JP (1) JPH0714500B2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6191655A (en) * 1984-10-12 1986-05-09 Matsushita Electronics Corp Method for coating photoresist

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6191655A (en) * 1984-10-12 1986-05-09 Matsushita Electronics Corp Method for coating photoresist

Also Published As

Publication number Publication date
JPH0714500B2 (en) 1995-02-22

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees