JPS6438185A - Controlling method for ultrapure water producing device - Google Patents

Controlling method for ultrapure water producing device

Info

Publication number
JPS6438185A
JPS6438185A JP62192142A JP19214287A JPS6438185A JP S6438185 A JPS6438185 A JP S6438185A JP 62192142 A JP62192142 A JP 62192142A JP 19214287 A JP19214287 A JP 19214287A JP S6438185 A JPS6438185 A JP S6438185A
Authority
JP
Japan
Prior art keywords
circulation pump
pump
controlling
water
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62192142A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0450072B2 (fr
Inventor
Akio Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Organo Corp
Original Assignee
Organo Corp
Japan Organo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Organo Corp, Japan Organo Co Ltd filed Critical Organo Corp
Priority to JP62192142A priority Critical patent/JPS6438185A/ja
Publication of JPS6438185A publication Critical patent/JPS6438185A/ja
Publication of JPH0450072B2 publication Critical patent/JPH0450072B2/ja
Granted legal-status Critical Current

Links

JP62192142A 1987-07-31 1987-07-31 Controlling method for ultrapure water producing device Granted JPS6438185A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62192142A JPS6438185A (en) 1987-07-31 1987-07-31 Controlling method for ultrapure water producing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62192142A JPS6438185A (en) 1987-07-31 1987-07-31 Controlling method for ultrapure water producing device

Publications (2)

Publication Number Publication Date
JPS6438185A true JPS6438185A (en) 1989-02-08
JPH0450072B2 JPH0450072B2 (fr) 1992-08-13

Family

ID=16286390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62192142A Granted JPS6438185A (en) 1987-07-31 1987-07-31 Controlling method for ultrapure water producing device

Country Status (1)

Country Link
JP (1) JPS6438185A (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020076881A (ko) * 2001-03-31 2002-10-11 제이에이비에이코리아(주) 순수 및 초순수 제조장치의 구동상태 표시장치 및 방법
JP2023008823A (ja) * 2021-07-02 2023-01-19 オルガノ株式会社 純水製造装置およびその運転方法
WO2024257480A1 (fr) * 2023-06-15 2024-12-19 野村マイクロ・サイエンス株式会社 Système de circulation de liquide

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020076881A (ko) * 2001-03-31 2002-10-11 제이에이비에이코리아(주) 순수 및 초순수 제조장치의 구동상태 표시장치 및 방법
JP2023008823A (ja) * 2021-07-02 2023-01-19 オルガノ株式会社 純水製造装置およびその運転方法
WO2024257480A1 (fr) * 2023-06-15 2024-12-19 野村マイクロ・サイエンス株式会社 Système de circulation de liquide
JP2024179698A (ja) * 2023-06-15 2024-12-26 野村マイクロ・サイエンス株式会社 液体循環システム
CN120603789A (zh) * 2023-06-15 2025-09-05 野村微科学股份有限公司 液体循环系统

Also Published As

Publication number Publication date
JPH0450072B2 (fr) 1992-08-13

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees