JPH0450072B2 - - Google Patents
Info
- Publication number
- JPH0450072B2 JPH0450072B2 JP62192142A JP19214287A JPH0450072B2 JP H0450072 B2 JPH0450072 B2 JP H0450072B2 JP 62192142 A JP62192142 A JP 62192142A JP 19214287 A JP19214287 A JP 19214287A JP H0450072 B2 JPH0450072 B2 JP H0450072B2
- Authority
- JP
- Japan
- Prior art keywords
- circulation pump
- flow rate
- ultrapure water
- pressure
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 63
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 47
- 239000012498 ultrapure water Substances 0.000 claims description 47
- 238000004519 manufacturing process Methods 0.000 claims description 33
- 239000012528 membrane Substances 0.000 claims description 13
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 claims description 4
- 239000003456 ion exchange resin Substances 0.000 claims description 4
- 229920003303 ion-exchange polymer Polymers 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 238000011144 upstream manufacturing Methods 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000008367 deionised water Substances 0.000 description 3
- 229910021641 deionized water Inorganic materials 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 241000894006 Bacteria Species 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000001223 reverse osmosis Methods 0.000 description 2
- 238000000108 ultra-filtration Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000008235 industrial water Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000005374 membrane filtration Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000008213 purified water Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000008400 supply water Substances 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62192142A JPS6438185A (en) | 1987-07-31 | 1987-07-31 | Controlling method for ultrapure water producing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62192142A JPS6438185A (en) | 1987-07-31 | 1987-07-31 | Controlling method for ultrapure water producing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6438185A JPS6438185A (en) | 1989-02-08 |
| JPH0450072B2 true JPH0450072B2 (fr) | 1992-08-13 |
Family
ID=16286390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62192142A Granted JPS6438185A (en) | 1987-07-31 | 1987-07-31 | Controlling method for ultrapure water producing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6438185A (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020076881A (ko) * | 2001-03-31 | 2002-10-11 | 제이에이비에이코리아(주) | 순수 및 초순수 제조장치의 구동상태 표시장치 및 방법 |
| JP2023008823A (ja) * | 2021-07-02 | 2023-01-19 | オルガノ株式会社 | 純水製造装置およびその運転方法 |
| JP7584574B1 (ja) * | 2023-06-15 | 2024-11-15 | 野村マイクロ・サイエンス株式会社 | 液体循環システム |
-
1987
- 1987-07-31 JP JP62192142A patent/JPS6438185A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6438185A (en) | 1989-02-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |