JPS6438186A - Controlling method for ultrapure water producing device - Google Patents

Controlling method for ultrapure water producing device

Info

Publication number: JPS6438186A
Authority: JP; Japan
Prior art keywords: flow rate; circulation pump; water; ultrapure water; pump
Prior art date: 1987-07-31
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP62192143A

Other languages

English (en)

Other versions

JPH0450073B2 (ja

Inventor

Akio Hayashi

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Organo Corp

Original Assignee

Organo Corp

Japan Organo Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-07-31

Filing date

1987-07-31

Publication date

1989-02-08

1987-07-31 Application filed by Organo Corp, Japan Organo Co Ltd filed Critical Organo Corp

1987-07-31 Priority to JP62192143A priority Critical patent/JPS6438186A/ja

1989-02-08 Publication of JPS6438186A publication Critical patent/JPS6438186A/ja

1992-08-13 Publication of JPH0450073B2 publication Critical patent/JPH0450073B2/ja

Status Granted legal-status Critical Current

Links

229910021642 ultra pure water Inorganic materials 0.000 title abstract 4
239000012498 ultrapure water Substances 0.000 title abstract 4
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 6
239000012528 membrane Substances 0.000 abstract 1

JP62192143A 1987-07-31 1987-07-31 Controlling method for ultrapure water producing device Granted JPS6438186A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP62192143A JPS6438186A (en)	1987-07-31	1987-07-31	Controlling method for ultrapure water producing device

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP62192143A JPS6438186A (en)	1987-07-31	1987-07-31	Controlling method for ultrapure water producing device

Publications (2)

Publication Number	Publication Date
JPS6438186A true JPS6438186A (en)	1989-02-08
JPH0450073B2 JPH0450073B2 (ja)	1992-08-13

Family

ID=16286409

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP62192143A Granted JPS6438186A (en)	1987-07-31	1987-07-31	Controlling method for ultrapure water producing device

Country Status (1)

Country	Link
JP (1)	JPS6438186A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH05329470A (ja) *	1992-05-28	1993-12-14	Ebara Corp	洗浄水製造装置
WO2024257480A1 (ja) *	2023-06-15	2024-12-19	野村マイクロ・サイエンス株式会社	液体循環システム

1987
- 1987-07-31 JP JP62192143A patent/JPS6438186A/ja active Granted

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH05329470A (ja) *	1992-05-28	1993-12-14	Ebara Corp	洗浄水製造装置
WO2024257480A1 (ja) *	2023-06-15	2024-12-19	野村マイクロ・サイエンス株式会社	液体循環システム
JP2024179698A (ja) *	2023-06-15	2024-12-26	野村マイクロ・サイエンス株式会社	液体循環システム
CN120603789A (zh) *	2023-06-15	2025-09-05	野村微科学股份有限公司	液体循环系统

Also Published As

Publication number	Publication date
JPH0450073B2 (ja)	1992-08-13

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Legal Events

Date	Code	Title	Description
2003-08-13	LAPS	Cancellation because of no payment of annual fees