JPS6438253U - - Google Patents

Info

Publication number
JPS6438253U
JPS6438253U JP1987134803U JP13480387U JPS6438253U JP S6438253 U JPS6438253 U JP S6438253U JP 1987134803 U JP1987134803 U JP 1987134803U JP 13480387 U JP13480387 U JP 13480387U JP S6438253 U JPS6438253 U JP S6438253U
Authority
JP
Japan
Prior art keywords
workpiece
work holder
storage tank
surface plate
weight adjustment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987134803U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987134803U priority Critical patent/JPS6438253U/ja
Publication of JPS6438253U publication Critical patent/JPS6438253U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案のポリシング加工機の実施例を
示す断面図、第2図は第1図の―線断面図、
第3図は本考案の他の実施例を示す断面図である
。 W…工作物、10…ポリシング定盤、13…ワ
ークホルダ、16…貯溜漕、15…給排口、30
…ケーシング、W…工作物。
Fig. 1 is a sectional view showing an embodiment of the polishing machine of the present invention, Fig. 2 is a sectional view taken along the line - - of Fig. 1,
FIG. 3 is a sectional view showing another embodiment of the present invention. W... Workpiece, 10... Polishing surface plate, 13... Work holder, 16... Storage tank, 15... Supply/discharge port, 30
...Casing, W...Workpiece.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 工作物を保持したワークホルダをポリシング定
盤に対して相対回転ならびに相対的接近離間運動
させかつこの工作物と前記ポリシング定盤間に砥
粒を含む加工液を供給して前記工作物の加工を行
うポリシング加工機において、前記ワークホルダ
もしくはこのワークホルダと一体をなすケーシン
グに、重量調整用流体を貯溜する貯溜漕と、この
貯溜漕に対して重量調整用流体を出し入れする給
排口を形成したことを特徴とするポリシング加工
機。
A work holder holding a workpiece is rotated relative to and moved toward and away from the polishing surface plate, and a machining fluid containing abrasive grains is supplied between the workpiece and the polishing surface plate to process the workpiece. In the polishing machine, the work holder or a casing integrated with the work holder is formed with a storage tank for storing a weight adjustment fluid and a supply/discharge port for introducing and removing the weight adjustment fluid from the storage tank. This polishing machine is characterized by:
JP1987134803U 1987-09-03 1987-09-03 Pending JPS6438253U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987134803U JPS6438253U (en) 1987-09-03 1987-09-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987134803U JPS6438253U (en) 1987-09-03 1987-09-03

Publications (1)

Publication Number Publication Date
JPS6438253U true JPS6438253U (en) 1989-03-07

Family

ID=31393879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987134803U Pending JPS6438253U (en) 1987-09-03 1987-09-03

Country Status (1)

Country Link
JP (1) JPS6438253U (en)

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