JPS643949A - Electron beam checking device - Google Patents

Electron beam checking device

Info

Publication number
JPS643949A
JPS643949A JP62157654A JP15765487A JPS643949A JP S643949 A JPS643949 A JP S643949A JP 62157654 A JP62157654 A JP 62157654A JP 15765487 A JP15765487 A JP 15765487A JP S643949 A JPS643949 A JP S643949A
Authority
JP
Japan
Prior art keywords
image
screen
expanded
area
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62157654A
Other languages
Japanese (ja)
Inventor
Yoshikazu Tanabe
Kenji Takamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62157654A priority Critical patent/JPS643949A/en
Publication of JPS643949A publication Critical patent/JPS643949A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To reduce the electron beam radiation time of an object to be checked by specifying the area to be expanded for observation of the image of the object displayed on the screen of a display device and displaying the expanded image of the image in this specified area at the desired multiplying factor at nearly the center of the screen. CONSTITUTION:The area W to be expanded for observation of the image 2a of an object 2 displayed on the screen 15a of a display device 15 is specified. The expanded image of the image in the specified area W at the desired multiplying factor is displayed at nearly the center of the screen 15a. The area W to be expanded for observation is not required to be moved to the center of the screen. The election beam radiation time of the object can be thereby reduced.
JP62157654A 1987-06-26 1987-06-26 Electron beam checking device Pending JPS643949A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62157654A JPS643949A (en) 1987-06-26 1987-06-26 Electron beam checking device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62157654A JPS643949A (en) 1987-06-26 1987-06-26 Electron beam checking device

Publications (1)

Publication Number Publication Date
JPS643949A true JPS643949A (en) 1989-01-09

Family

ID=15654451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62157654A Pending JPS643949A (en) 1987-06-26 1987-06-26 Electron beam checking device

Country Status (1)

Country Link
JP (1) JPS643949A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0478092U (en) * 1990-11-21 1992-07-08
WO2000003413A1 (en) * 1998-07-10 2000-01-20 Hitachi, Ltd. Method for observing specimen and device therefor
KR100478915B1 (en) * 2002-05-27 2005-03-28 에이앤디 테크놀러지(주) Apparatus for sensing fuel level having temperature compensation circuit
JP2007047080A (en) * 2005-08-11 2007-02-22 Hitachi High-Technologies Corp Scanning electron microscope and image display method thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0478092U (en) * 1990-11-21 1992-07-08
WO2000003413A1 (en) * 1998-07-10 2000-01-20 Hitachi, Ltd. Method for observing specimen and device therefor
JP2000030652A (en) * 1998-07-10 2000-01-28 Hitachi Ltd Sample observation method and apparatus
KR100478915B1 (en) * 2002-05-27 2005-03-28 에이앤디 테크놀러지(주) Apparatus for sensing fuel level having temperature compensation circuit
JP2007047080A (en) * 2005-08-11 2007-02-22 Hitachi High-Technologies Corp Scanning electron microscope and image display method thereof

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