JPS64402A - Positioning device - Google Patents

Positioning device

Info

Publication number
JPS64402A
JPS64402A JP15611787A JP15611787A JPS64402A JP S64402 A JPS64402 A JP S64402A JP 15611787 A JP15611787 A JP 15611787A JP 15611787 A JP15611787 A JP 15611787A JP S64402 A JPS64402 A JP S64402A
Authority
JP
Japan
Prior art keywords
lens
electrode
laser beam
work
reference plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15611787A
Other languages
Japanese (ja)
Other versions
JPH01402A (en
Inventor
Kiyoshi Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inoue Japax Research Inc
Original Assignee
Inoue Japax Research Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inoue Japax Research Inc filed Critical Inoue Japax Research Inc
Priority to JP62-156117A priority Critical patent/JPH01402A/en
Priority claimed from JP62-156117A external-priority patent/JPH01402A/en
Publication of JPS64402A publication Critical patent/JPS64402A/en
Publication of JPH01402A publication Critical patent/JPH01402A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

PURPOSE: To enable distance measurement with high accuracy of a quarter wavelength by projecting a laser beam on an object to be measured and subjecting the interference fringes of reflected light to an arithmetic processing.
CONSTITUTION: The laser beam outputted from an oscillator 1 is focused by an objective lens 5 and projects the reference plane of an electrode 6 for electric discharge machining. The reflected light thereof is detected by a photodetecting element 13 and after the output thereof is amplified 14, the output is compared with a preset reference value in a comparator 16, the differential signal of which is applied to a motor driving circuit 11 and, therefore, the lens 5 moves to the position where the focus O aligns to the reference plane of the electrode 6, then the lens stops moving. The lens 5 moves to the point where the focus aligns to the reference plane of a work 7 when the electrode 6 is raised and the work is irradiated. On the other hand, the laser beam is split by a half mirror 3. The split beam is reflected by a reflecting cube 12 fixed to the lens 5 via a rectangular reflecting mirror 22 and interferes with the fixed wave from a reflecting film 24. The interference fringes generated during the movement of the lens 5 are, therefore, detected and are subjected to waveform forming and counting, by which the distance between the electrode 6 and the work 7 is computed.
COPYRIGHT: (C)1989,JPO&Japio
JP62-156117A 1987-06-23 positioning device Pending JPH01402A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62-156117A JPH01402A (en) 1987-06-23 positioning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62-156117A JPH01402A (en) 1987-06-23 positioning device

Publications (2)

Publication Number Publication Date
JPS64402A true JPS64402A (en) 1989-01-05
JPH01402A JPH01402A (en) 1989-01-05

Family

ID=

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5332555A (en) * 1990-07-27 1994-07-26 Agency Of Industrial Science & Technology Ozone beam generation apparatus and method for generating an ozone beam
US8832909B2 (en) 2009-09-30 2014-09-16 Ykk Corporation Slide fastener

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5332555A (en) * 1990-07-27 1994-07-26 Agency Of Industrial Science & Technology Ozone beam generation apparatus and method for generating an ozone beam
US8832909B2 (en) 2009-09-30 2014-09-16 Ykk Corporation Slide fastener

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