JPS64407A - Instrument for measuring edge shape - Google Patents

Instrument for measuring edge shape

Info

Publication number
JPS64407A
JPS64407A JP62062065A JP6206587A JPS64407A JP S64407 A JPS64407 A JP S64407A JP 62062065 A JP62062065 A JP 62062065A JP 6206587 A JP6206587 A JP 6206587A JP S64407 A JPS64407 A JP S64407A
Authority
JP
Japan
Prior art keywords
light
mark
edge
scattered light
shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62062065A
Other languages
Japanese (ja)
Other versions
JPH01407A (en
Inventor
Yuji Imai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP62-62065A priority Critical patent/JPH01407A/en
Priority claimed from JP62-62065A external-priority patent/JPH01407A/en
Publication of JPS64407A publication Critical patent/JPS64407A/en
Publication of JPH01407A publication Critical patent/JPH01407A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To measure the edge shape of an alignment mark by projecting a luminous flux for detection onto an object having the edge to be detected and outputting the detection signal corresponding to the spatial spread of the scattered light from the edge.
CONSTITUTION: Alignment light 1 irradiates the alignment mark 7' provided on a wafer 7 via projecting means 2W6. The light 1 generates the scattered light in the edge part of the mark 7'. The scattered light travels backward in the projecting means 2W6 and enters a space filter 9 disposed in conjugation with an entrance pupil position 6a of a projecting lens 6. The specular reflected light is cut and only the scattered light component enters a line sensor 10, by which the light is photoelectrically converted and is sent to a signal processing unit 11. The shape of the mark 7' is known if the relation of the position of the sensor 10 where the scattered light indicating the spread of the sensor 10 corresponding to the scattering direction and the inclination of the edge is determined on the relative position coordinates of the light 1 and the mark 7'. The shape is then compared with the set value previously stored in a computer, by which the collapse of the mark 7' subjected to processing is determined.
COPYRIGHT: (C)1989,JPO&Japio
JP62-62065A 1987-03-17 Edge shape measuring device Pending JPH01407A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62-62065A JPH01407A (en) 1987-03-17 Edge shape measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62-62065A JPH01407A (en) 1987-03-17 Edge shape measuring device

Publications (2)

Publication Number Publication Date
JPS64407A true JPS64407A (en) 1989-01-05
JPH01407A JPH01407A (en) 1989-01-05

Family

ID=

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