JPS64407A - Instrument for measuring edge shape - Google Patents

Instrument for measuring edge shape

Info

Publication number
JPS64407A
JPS64407A JP62062065A JP6206587A JPS64407A JP S64407 A JPS64407 A JP S64407A JP 62062065 A JP62062065 A JP 62062065A JP 6206587 A JP6206587 A JP 6206587A JP S64407 A JPS64407 A JP S64407A
Authority
JP
Japan
Prior art keywords
light
mark
edge
scattered light
shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62062065A
Other languages
English (en)
Other versions
JPH01407A (ja
Inventor
Yuji Imai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP62062065A priority Critical patent/JPS64407A/ja
Publication of JPH01407A publication Critical patent/JPH01407A/ja
Publication of JPS64407A publication Critical patent/JPS64407A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP62062065A 1987-03-17 1987-03-17 Instrument for measuring edge shape Pending JPS64407A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62062065A JPS64407A (en) 1987-03-17 1987-03-17 Instrument for measuring edge shape

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62062065A JPS64407A (en) 1987-03-17 1987-03-17 Instrument for measuring edge shape

Publications (2)

Publication Number Publication Date
JPH01407A JPH01407A (ja) 1989-01-05
JPS64407A true JPS64407A (en) 1989-01-05

Family

ID=13189333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62062065A Pending JPS64407A (en) 1987-03-17 1987-03-17 Instrument for measuring edge shape

Country Status (1)

Country Link
JP (1) JPS64407A (ja)

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