JPS64432A - Semiconductor pressure transducer - Google Patents

Semiconductor pressure transducer

Info

Publication number
JPS64432A
JPS64432A JP15448587A JP15448587A JPS64432A JP S64432 A JPS64432 A JP S64432A JP 15448587 A JP15448587 A JP 15448587A JP 15448587 A JP15448587 A JP 15448587A JP S64432 A JPS64432 A JP S64432A
Authority
JP
Japan
Prior art keywords
size
pedestal
recess
pressure transducer
metallic base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15448587A
Other languages
Japanese (ja)
Other versions
JPH01432A (en
Inventor
Atsushi Miyazaki
Masayuki Ozawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15448587A priority Critical patent/JPS64432A/en
Publication of JPH01432A publication Critical patent/JPH01432A/en
Publication of JPS64432A publication Critical patent/JPS64432A/en
Pending legal-status Critical Current

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  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE: To reduce the diameter of a lead pin and the size of a pressure transducer by providing a recess for housing a pedestal to a metallic base so that the peak face of the metallic base and the peak face of the pedestal is made flush with each other.
CONSTITUTION: The recess 3a is provided to the peak face of the metallic base 3 and the depth size of the recess 3a is set the same as the height size of the pedestal 2. The pedestal 2 is loosely fitted via a gap (g) into the recess 3a. Since the height size H of a cap 8 is extremely decreased, the size of the pressure transducer is reduced. Since the extreme shortening of the projecting size of the lead pin 4 is possible, the generation of the trouble relating to the resonance is obviated and the reduction of the diameter of the pin 4 is enabled.
COPYRIGHT: (C)1989,JPO&Japio
JP15448587A 1987-06-23 1987-06-23 Semiconductor pressure transducer Pending JPS64432A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15448587A JPS64432A (en) 1987-06-23 1987-06-23 Semiconductor pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15448587A JPS64432A (en) 1987-06-23 1987-06-23 Semiconductor pressure transducer

Publications (2)

Publication Number Publication Date
JPH01432A JPH01432A (en) 1989-01-05
JPS64432A true JPS64432A (en) 1989-01-05

Family

ID=15585274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15448587A Pending JPS64432A (en) 1987-06-23 1987-06-23 Semiconductor pressure transducer

Country Status (1)

Country Link
JP (1) JPS64432A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03200035A (en) * 1989-12-28 1991-09-02 Matsushita Electric Ind Co Ltd semiconductor pressure sensor
JPH03200034A (en) * 1989-12-28 1991-09-02 Matsushita Electric Ind Co Ltd semiconductor pressure sensor
US5107058A (en) * 1990-12-05 1992-04-21 Exxon Research And Engineering Company Olefin/paraffin separation via membrane extraction
JP2013543136A (en) * 2010-11-22 2013-11-28 ゼネラル・エレクトリック・カンパニイ Sensing device with coupling element

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03200035A (en) * 1989-12-28 1991-09-02 Matsushita Electric Ind Co Ltd semiconductor pressure sensor
JPH03200034A (en) * 1989-12-28 1991-09-02 Matsushita Electric Ind Co Ltd semiconductor pressure sensor
US5107058A (en) * 1990-12-05 1992-04-21 Exxon Research And Engineering Company Olefin/paraffin separation via membrane extraction
JP2013543136A (en) * 2010-11-22 2013-11-28 ゼネラル・エレクトリック・カンパニイ Sensing device with coupling element
JP2017072587A (en) * 2010-11-22 2017-04-13 アンフェノール サーモメトリックス インコーポレイテッドＡｍｐｈｅｎｏｌ Ｔｈｅｒｍｏｍｅｔｒｉｃｓ， Ｉｎｃ． Sensing device comprising coupling element

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