JPS64432A - Semiconductor pressure transducer - Google Patents

Semiconductor pressure transducer

Info

Publication number: JPS64432A
Authority: JP; Japan
Prior art keywords: size; pedestal; recess; pressure transducer; metallic base
Prior art date: 1987-06-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP15448587A

Other languages

English (en)

Other versions

JPH01432A (ja

Inventor

Atsushi Miyazaki

Masayuki Ozawa

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Hitachi Ltd

Original Assignee

Hitachi Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-06-23

Filing date

1987-06-23

Publication date

1989-01-05

1987-06-23 Application filed by Hitachi Ltd filed Critical Hitachi Ltd

1987-06-23 Priority to JP15448587A priority Critical patent/JPS64432A/ja

1989-01-05 Publication of JPH01432A publication Critical patent/JPH01432A/ja

1989-01-05 Publication of JPS64432A publication Critical patent/JPS64432A/ja

Status Pending legal-status Critical Current

Links

239000004065 semiconductor Substances 0.000 title 1
NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 abstract 4
230000003247 decreasing effect Effects 0.000 abstract 1
238000004904 shortening Methods 0.000 abstract 1

Landscapes

Measuring Fluid Pressure (AREA)

JP15448587A 1987-06-23 1987-06-23 Semiconductor pressure transducer Pending JPS64432A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP15448587A JPS64432A (en)	1987-06-23	1987-06-23	Semiconductor pressure transducer

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP15448587A JPS64432A (en)	1987-06-23	1987-06-23	Semiconductor pressure transducer

Publications (2)

Publication Number	Publication Date
JPH01432A JPH01432A (ja)	1989-01-05
JPS64432A true JPS64432A (en)	1989-01-05

Family

ID=15585274

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP15448587A Pending JPS64432A (en)	1987-06-23	1987-06-23	Semiconductor pressure transducer

Country Status (1)

Country	Link
JP (1)	JPS64432A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH03200035A (ja) *	1989-12-28	1991-09-02	Matsushita Electric Ind Co Ltd	半導体圧力センサ
JPH03200034A (ja) *	1989-12-28	1991-09-02	Matsushita Electric Ind Co Ltd	半導体圧力センサ
US5107058A (en) *	1990-12-05	1992-04-21	Exxon Research And Engineering Company	Olefin/paraffin separation via membrane extraction
JP2013543136A (ja) *	2010-11-22	2013-11-28	ゼネラル・エレクトリック・カンパニイ	結合要素を備える感知装置

1987
- 1987-06-23 JP JP15448587A patent/JPS64432A/ja active Pending

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH03200035A (ja) *	1989-12-28	1991-09-02	Matsushita Electric Ind Co Ltd	半導体圧力センサ
JPH03200034A (ja) *	1989-12-28	1991-09-02	Matsushita Electric Ind Co Ltd	半導体圧力センサ
US5107058A (en) *	1990-12-05	1992-04-21	Exxon Research And Engineering Company	Olefin/paraffin separation via membrane extraction
JP2013543136A (ja) *	2010-11-22	2013-11-28	ゼネラル・エレクトリック・カンパニイ	結合要素を備える感知装置
JP2017072587A (ja) *	2010-11-22	2017-04-13	アンフェノールサーモメトリックスインコーポレイテッドＡｍｐｈｅｎｏｌＴｈｅｒｍｏｍｅｔｒｉｃｓ，Ｉｎｃ．	結合要素を備える感知装置

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