JPS6444443U - - Google Patents
Info
- Publication number
- JPS6444443U JPS6444443U JP13984187U JP13984187U JPS6444443U JP S6444443 U JPS6444443 U JP S6444443U JP 13984187 U JP13984187 U JP 13984187U JP 13984187 U JP13984187 U JP 13984187U JP S6444443 U JPS6444443 U JP S6444443U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- gas
- test
- leakage
- supply source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Description
第1図及び第2図は本考案の一実施例を示すも
ので、第1図は装置の全体構成を一部破断面によ
り示した側面図、第2図は要部の拡大縦断面図で
ある。そして第3図は従来例を示した第1図相当
図である。
図中、11はパイプ、11aはパイプの開口端
、12は検査容器、13はカプラ、14及び15
は夫々シール部材、16及び20は夫々真空ポン
プ、17はヘリウムガス供給装置(検査用ガスの
供給源)、28は排気口である。
Figures 1 and 2 show an embodiment of the present invention. Figure 1 is a side view showing the overall structure of the device with a partially cutaway surface, and Figure 2 is an enlarged longitudinal cross-sectional view of the main parts. be. FIG. 3 is a diagram corresponding to FIG. 1 showing a conventional example. In the figure, 11 is a pipe, 11a is an open end of the pipe, 12 is a test container, 13 is a coupler, 14 and 15
16 and 20 are vacuum pumps, 17 is a helium gas supply device (inspection gas supply source), and 28 is an exhaust port.
Claims (1)
記パイプの開口端に接続したカプラを通じて検査
用ガスを前記パイプ内に供給すると共に、前記検
査容器内を前記カプラにより閉じた状態で真空引
きすることにより前記パイプからの検査用ガスの
リークを検査するものにおいて、前記パイプの開
口端寄りにそのパイプを貫通させるように設けら
れ前記検査容器内と前記検査ガスの供給源側との
間をシールする一対のシール部材の間に、前記検
査用ガスの供給源側からの漏洩ガスを排気する排
気口を設けたことを特徴とするパイプのリーク検
査装置。 A pipe with a closed end is inserted into a test container, and a test gas is supplied into the pipe through a coupler connected to the open end of the pipe, and the test container is evacuated while being closed by the coupler. In the apparatus for inspecting the leakage of the test gas from the pipe, the pipe is provided near the open end of the pipe so as to penetrate the pipe, and seals between the inside of the test container and the supply source side of the test gas. A pipe leakage inspection device characterized in that an exhaust port is provided between the pair of sealing members for exhausting leakage gas from the supply source side of the inspection gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13984187U JPS6444443U (en) | 1987-09-12 | 1987-09-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13984187U JPS6444443U (en) | 1987-09-12 | 1987-09-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6444443U true JPS6444443U (en) | 1989-03-16 |
Family
ID=31403473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13984187U Pending JPS6444443U (en) | 1987-09-12 | 1987-09-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6444443U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020106321A (en) * | 2018-12-26 | 2020-07-09 | 三菱電機株式会社 | Leak inspection device and leak inspection method |
-
1987
- 1987-09-12 JP JP13984187U patent/JPS6444443U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020106321A (en) * | 2018-12-26 | 2020-07-09 | 三菱電機株式会社 | Leak inspection device and leak inspection method |
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