JPS6410643U - - Google Patents
Info
- Publication number
- JPS6410643U JPS6410643U JP10501787U JP10501787U JPS6410643U JP S6410643 U JPS6410643 U JP S6410643U JP 10501787 U JP10501787 U JP 10501787U JP 10501787 U JP10501787 U JP 10501787U JP S6410643 U JPS6410643 U JP S6410643U
- Authority
- JP
- Japan
- Prior art keywords
- sealed container
- gas
- leak
- test
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Description
第１図は本考案の一実施例にかかるリークテス
ト装置を示す概略図である。
１……ヘリウムリークデイテクタ、２……吸入
パイプ、３……被検査物、５……密封容器、１０
……濃度センサ、１１……圧力センサ、１２……
真空排気ポンプ、１４……Ｈｅガスボンベ、１９
……制御手段。
FIG. 1 is a schematic diagram showing a leak test device according to an embodiment of the present invention. 1... Helium leak detector, 2... Suction pipe, 3... Test object, 5... Sealed container, 10
... Concentration sensor, 11 ... Pressure sensor, 12 ...
Vacuum pump, 14...He gas cylinder, 19
...control means.
Claims (1)
行うリークテスト装置において、 被検査物が、リークデイテクタの分析部に導く
吸入パイプに装着された状態で、収納される分割
構造の密封容器と、 この密封容器の内部を真空排気する排気手段と
、 真空排気された前記密封容器内にＨｅガスを供
給するＨｅガス供給手段と、 前記密封容器内におけるＨｅガスの濃度および
圧力を検知する検知手段と、 この検知手段からの出力信号に基づいて前記密
封容器内のＨｅガスの濃度および圧力を一定に制
御する制御手段と、 を備えていることを特徴とするリークテスト装置
。[Scope of Claim for Utility Model Registration] In a leak test device that performs a leak test on a test object using He gas, the test object is stored in a state where it is attached to a suction pipe leading to the analysis section of a leak detector. a sealed container with a divided structure; an evacuation means for evacuating the inside of the sealed container; a He gas supply means for supplying He gas into the evacuated sealed container; A leak characterized by comprising: a detection means for detecting concentration and pressure; and a control means for controlling the concentration and pressure of He gas in the sealed container to be constant based on an output signal from the detection means. Test equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10501787U JPS6410643U (en) | 1987-07-08 | 1987-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10501787U JPS6410643U (en) | 1987-07-08 | 1987-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6410643U true JPS6410643U (en) | 1989-01-20 |
Family
ID=31337256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10501787U Pending JPS6410643U (en) | 1987-07-08 | 1987-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6410643U (en) |
-
1987
- 1987-07-08 JP JP10501787U patent/JPS6410643U/ja active Pending
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