JPS6445146A - Manufacture of superconducting device - Google Patents
Manufacture of superconducting deviceInfo
- Publication number
- JPS6445146A JPS6445146A JP62202145A JP20214587A JPS6445146A JP S6445146 A JPS6445146 A JP S6445146A JP 62202145 A JP62202145 A JP 62202145A JP 20214587 A JP20214587 A JP 20214587A JP S6445146 A JPS6445146 A JP S6445146A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- metal
- leads
- frequency characteristics
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000002184 metal Substances 0.000 abstract 4
- 239000004065 semiconductor Substances 0.000 abstract 4
- 239000010409 thin film Substances 0.000 abstract 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- 150000001875 compounds Chemical class 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 239000004020 conductor Substances 0.000 abstract 1
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 239000012212 insulator Substances 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Containers, Films, And Cooling For Superconductive Devices (AREA)
Abstract
PURPOSE:To contrive improvement in the frequency characteristics of an element by a method wherein a part or the whole of the interwiring of a semiconductor device is formed by superposing an superconducting oxide on a metal or metal semiconductor compound. CONSTITUTION:A conductive thin film is provided on the insulator 2 located on a substrate 1, a thin film of superconducting oxide is provided on the thin film, and leads 10 and 10' of multilayer structure is formed by selectively removing said multilayer thin film. Then, the conductor of the lower part of the leads 10 and 10' and the electrode part on the substrate 1 are coupled with the coupling part 19 of a metal or a metal semiconductor compound or a superconducting material. Accordingly, when a semiconductor device is brought to the temperature of liquid nitrogen, its electrons or hall mobility can be improved three to four times. Also, the electric resistance of said leads and electrode can be made equal to zero, and the R (resistance) in the CR time constant showing the time lag of frequency characteristics can be made zero. As a result, the frequency characteristics can be improved.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62202145A JPS6445146A (en) | 1987-08-13 | 1987-08-13 | Manufacture of superconducting device |
| CN88106054A CN1017110B (en) | 1987-08-13 | 1988-08-13 | A superconducting device |
| EP88307561A EP0303521A3 (en) | 1987-08-13 | 1988-08-15 | Superconducting device and methods of manufacturing the same |
| US07/751,573 US5283465A (en) | 1987-08-13 | 1991-08-22 | Superconducting lead on integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62202145A JPS6445146A (en) | 1987-08-13 | 1987-08-13 | Manufacture of superconducting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6445146A true JPS6445146A (en) | 1989-02-17 |
Family
ID=16452706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62202145A Pending JPS6445146A (en) | 1987-08-13 | 1987-08-13 | Manufacture of superconducting device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6445146A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60154613A (en) * | 1984-01-25 | 1985-08-14 | Hitachi Ltd | Semiconductor device for ultra-low temperature |
| JPS63318755A (en) * | 1987-06-22 | 1988-12-27 | Mitsubishi Electric Corp | Semiconductor device |
| JPS6413743A (en) * | 1987-07-08 | 1989-01-18 | Hitachi Ltd | Superconductive wiring structure |
| JPS6427244A (en) * | 1987-04-08 | 1989-01-30 | Hitachi Ltd | Wiring construction of integrated circuit |
-
1987
- 1987-08-13 JP JP62202145A patent/JPS6445146A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60154613A (en) * | 1984-01-25 | 1985-08-14 | Hitachi Ltd | Semiconductor device for ultra-low temperature |
| JPS6427244A (en) * | 1987-04-08 | 1989-01-30 | Hitachi Ltd | Wiring construction of integrated circuit |
| JPS63318755A (en) * | 1987-06-22 | 1988-12-27 | Mitsubishi Electric Corp | Semiconductor device |
| JPS6413743A (en) * | 1987-07-08 | 1989-01-18 | Hitachi Ltd | Superconductive wiring structure |
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